Mass flow controllers

Back to catalog

Our mass flow controllers provide precise and repeatable measurements and control of mass flow across a wide measurement range. Versatile and highly configurable by design, they are available for different flow ranges, fluidic connections and various interfaces. Sensirion’s mass flow controllers are suitable for different applications in industrial automation, process control, and medical technology where accuracy and reliability are essential. With proven field performance and consistent quality, our mass flow sensors provide reliable solutions for accurate flow control in demanding environments. Explore our mass flow controller portfolio to find the configuration that fits your specific application.

Filters
  • Series

    • EK-F5x

      1

    • SFC3x00

      1

    • SFC4x00

      1

    • SFC5300

      2

    • SFC5400

      2

    • SFC5500

      5

    • SFC6000

      4

    • ASP1400

      0

    • EK-LD20xx

      0

    • EK-LPG10

      0

    • EK-Px

      0

    • EK-SLF3x

      0

    • EK-SLx

      0

    • ESS

      0

    • LD20

      0

    • LG01

      0

    • LG16

      0

    • LPG10

      0

    • LS32-1500

      0

    • SCC1

      0

    • SCC30-DB

      0

    • SCD30

      0

    • SCD4x

      0

    • SCD4x Gadget

      0

    • SDP1xxx

      0

    • SDP3x

      0

    • SDP5xx

      0

    • SDP6xx

      0

    • SDP8xx

      0

    • SDPxxx cap

      0

    • SEK-SCDxx

      0

    • SEK-SDP

      0

    • SEK-SEN5x

      0

    • SEK-SEN6x

      0

    • SEK-SensorBridge

      0

    • SEK-SFAxx

      0

    • SEK-SFMxxxx

      0

    • SEK-SHTxx

      0

    • SEK-SPSxx

      0

    • SEK-STC31

      0

    • SEK-STCC4

      0

    • SEK-STS4x

      0

    • SEK-SVMxx

      0

    • SEN5x

      0

    • SEN6x

      0

    • SENSEVAL-SCB4XV1

      0

    • SENSEVAL-SHT4XV1

      0

    • SFA30

      0

    • SFA40

      0

    • SFM3xxx

      0

    • SFM3xxx-AW/D

      0

    • SFM4xxx

      0

    • SFM5xxx

      0

    • SFM6000-OEM

      0

    • SFx filter cap

      0

    • SGD43S-M3-Sx

      0

    • SGM53xx

      0

    • SGM63xx

      0

    • SGM64xx

      0

    • SGP30

      0

    • SGP4x

      0

    • SGPC3

      0

    • SHT1x

      0

    • SHT2x

      0

    • SHT31 Smart Gadget

      0

    • SHT3x

      0

    • SHT43 DemoBoard

      0

    • SHT4x

      0

    • SHT4xA

      0

    • SHT4xI

      0

    • SHT4x Smart Gadget

      0

    • SHT7x

      0

    • SHT85

      0

    • SHTCx

      0

    • SHTWx

      0

    • SLD3P

      0

    • SLF3S

      0

    • SLF3x

      0

    • SLG

      0

    • SLI

      0

    • SLQ-QT105

      0

    • SLQ-QT500

      0

    • SLS-1500

      0

    • SPS30

      0

    • STC31

      0

    • STC42x

      0

    • STCC4

      0

    • STS2x

      0

    • STS3x

      0

    • STS4x

      0

    • STS4xA

      0

    • SVM30

      0
  • Class

    • Evaluation kit

      1

    • Sensor

      15

    • Accessory

      0

    • Development board

      0

    • Reference design

      0
  • Product status

    • Active

      14

    • Not recommended for new designs

      1

    • Obsolete

      1

    • Upcoming

      0

    • New

      0

    • Last time buy

      0
  • Interface

    • I²C

      4

    • RS485

      14

    • Device net

      6

    • IO link

      1

    • Analog voltage

      3

    • Analog current

      1

    • Sensibus

      0

    • PWM

      0

    • SDM

      0

    • UART

      0

    • RS232

      0

    • Switch

      0

    • ModBus

      0
SFC6000-OEM

SFC6000-OEM

MFC with best price-performance ratio, customizable version

Full scale flow rate
2, 5, 20 and 50 slm
Accuracy
0.2% FS or 2% SP
Calibration
Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses flow
Maximum operating pressure
10 bar
Fluidic connector ports
Push-in 6mm, downmount
Interfaces
Analog voltage, I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
102 x 45 x 20 mm
  • Sensor
  • Mass flow controllers
SFC6000D-5slm

SFC6000D-5slm

Best price-performance ratio, distribution version, 5 slm

Full scale flow rate
5 slm
Accuracy
0.2% FS or 2% SP
Calibration
Air, N₂, O₂, N₂O, Ar and CO₂ flow
Maximum operating pressure
10 bar
Fluidic connector ports
Push-in 6mm, downmount
Interfaces
I²C, RS485
Supply voltage
22.9 - 25.9 V
Size (LxWxH)
102 x 45 x 20 mm
  • Sensor
  • Mass flow controllers
SFC6000D-50slm

SFC6000D-50slm

Best price-performance ratio, distribution version, 50 slm

Full scale flow rate
50 slm
Accuracy
0.2% FS or 2% SP
Calibration
Air, N₂, O₂, N₂O and Ar and CO₂ flow
Maximum operating pressure
10 bar
Fluidic connector ports
Push-in 6mm, downmount
Interfaces
I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
102 x 45 x 20 mm
  • Sensor
  • Mass flow controllers
SFC6000D-20slm

SFC6000D-20slm

Best price-performance ratio, distribution version, 20 slm

Full scale flow rate
20 slm
Accuracy
0.2% FS or 2% SP
Calibration
Air, N₂, O₂, N₂O, Ar and CO₂ flow
Maximum operating pressure
10 bar
Fluidic connector ports
Push-in 6mm, downmount
Interfaces
I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
102 x 45 x 20 mm
  • Sensor
  • Mass flow controllers
SFC5500-50sccm

SFC5500-50sccm

Versatile mass flow controller, via online distribution, 50sccm

Full scale flow rate
0.05 slm
Accuracy
0.2%FS or 2% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
10 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Mass flow controllers
SFC5500-2slm

SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

Full scale flow rate
2 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
8 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Mass flow controllers
SFC5500-200slm

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

Full scale flow rate
200 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2 and N2 flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
135 x 24.6 x 91 mm
  • Sensor
  • Mass flow controllers
SFC5500-10slm

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

Full scale flow rate
10 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
115 x 24.6 x 91 mm
  • Sensor
  • Mass flow controllers
SFC5500-0.5slm

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

Full scale flow rate
0.5 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
115 x 24.6 x 91 mm
  • Sensor
  • Mass flow controllers
SFC5460

SFC5460

Versatile MFC for OEM projects with high unit quantities

Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, H2, O2, He, Ar, CO2 and N2 and O2 flow flow
Maximum operating pressure
5 bar
Fluidic connector ports
Swagelok, VCR, VCO, W-Seal, Downmount
Interfaces
RS485
Supply voltage
14 - 26 V
Size (LxWxH)
101.1 x 24.4 x 91 mm
  • Sensor
  • Mass flow controllers
SFC5400

SFC5400

Versatile mass flow controller

Full scale flow rate
1, 2, 5, 10, 20, 50 and 100 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow
Maximum operating pressure
5 bar
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
101.1 x 24.4 x 91 mm
  • Sensor
  • Mass flow controllers
SFC5330

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

Full scale flow rate
1, 2 and 5 slm
Accuracy
0.2%FS or 2% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow
Maximum operating pressure
10 bar
Fluidic connector ports
Downmount
Interfaces
RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
34 x 25 x 62.2 mm
  • Sensor
  • Mass flow controllers
Products per page: