Versatile mass flow controller
Mass flow | |||
---|---|---|---|
Full scale flow rate 1, 2, 5, 10, 20, 50 and 100 | 1, 2, 5, 10, 20, 50 and 100 | slm | |
Full scale flow rate 50, 100, 200 and 500 | 50, 100, 200 and 500 | sccm | |
Accuracy 0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
Maximum operating pressure 5 | 5 | bar | |
Calibration Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
Fluidic connector ports Swagelock, VCO, VCR, Downmount | Swagelock, VCO, VCR, Downmount |
Generic | |||
---|---|---|---|
Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
Average supply current 50000 | 50000 | uA | |
Max. supply current 320000 | 320000 | uA | |
Interfaces Analog voltage, Analog current, Device net, IO link, RS485 | Analog voltage, Analog current, Device net, IO link, RS485 | ||
Size (LxWxH) 101.1 x 24.4 x 91 | 101.1 x 24.4 x 91 | mm |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
![]() | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.