Versatile mass flow controller
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate1, 2, 5, 10, 20, 50 and 100slm | 1, 2, 5, 10, 20, 50 and 100 | slm | |
| Full scale flow rate50, 100, 200 and 500sccm | 50, 100, 200 and 500 | sccm | |
| Accuracy0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
| Maximum operating pressure5bar | 5 | bar | |
| CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flow | Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| Fluidic connector portsSwagelock, VCO, VCR, Downmount | Swagelock, VCO, VCR, Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage14 - 26.4V | 14 - 26.4 | V | |
| Average supply current50000uA | 50000 | uA | |
| Max. supply current320000uA | 320000 | uA | |
| InterfacesAnalog voltage, Analog current, Device net, IO link, RS485 | Analog voltage, Analog current, Device net, IO link, RS485 | ||
| Size (LxWxH)101.1 x 24.4 x 91mm |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
| 101.1 x 24.4 x 91 |
| mm |