SFC5330
Small MFC for cost-sensitive OEM projects with high unit quantities
The SFC5330 mass flow controller measures and monitors mass flows with outstanding accuracy, long-term stability and repeatability. It features an impressively compact size and a broad dynamic measurement range. The SFC5330’s housing is made of metal. The SFC5330 mass flow controller is available with downmount connections and two digital interfaces. The SFC5330 is the smaller variant of the SFC5300 mass flow controller, and is suitable for cost-sensitive OEM projects with high unit quantities. As with all Sensirion sensors, the SFC5330 mass flow meter’s outstanding performance is based on our innovative CMOSens® Technology, which integrates high-precision sensor technology and processing electronics onto a single CMOS silicon chip. Combined with high-quality materials, the result is the reliably stable, extremely fast and highly precise SFC5330 mass flow controller. The SFC5330 mass flow controller is also available in a valve-free version. The two sensor products have the same performance characteristics, and are used in similar applications, meaning they make for a perfect combination. For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate
1, 2 and 5
| 1, 2 and 5 | slm | |
| Full scale flow rate
50, 100, 200 and 500
| 50, 100, 200 and 500 | sccm | |
| Accuracy
0.2%FS or 2% SP
| 0.2%FS or 2% SP | ||
| Maximum operating pressure
10
| 10 | bar | |
| Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
| Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| Fluidic connector ports
Downmount
| Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage
14 - 26.4
| 14 - 26.4 | V | |
| Average supply current
50000
| 50000 | uA | |
| Max. supply current
320000
| 320000 | uA | |
| Interfaces
RS485
| RS485 | ||
| Size (LxWxH)
34 x 25 x 62.2
| 34 x 25 x 62.2 | mm³ |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Download the respective viewer software to start measuring
Go to download centerStart testing our sensors fast and easy with the evaluation kits
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