SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

The SFC5330 mass flow controller measures and monitors mass flows with outstanding accuracy, long-term stability and repeatability. It features an impressively compact size and a broad dynamic measurement range. The SFC5330’s housing is made of metal. The SFC5330 mass flow controller is available with downmount connections and two digital interfaces. The SFC5330 is the smaller variant of the SFC5300 mass flow controller, and is suitable for cost-sensitive OEM projects with high unit quantities. As with all Sensirion sensors, the SFC5330 mass flow meter’s outstanding performance is based on our innovative CMOSens® Technology, which integrates high-precision sensor technology and processing electronics onto a single CMOS silicon chip. Combined with high-quality materials, the result is the reliably stable, extremely fast and highly precise SFC5330 mass flow controller. The SFC5330 mass flow controller is also available in a valve-free version. The two sensor products have the same performance characteristics, and are used in similar applications, meaning they make for a perfect combination. For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.

Specification

Mass flow
Full scale flow rate
1, 2 and 5
1, 2 and 5slm
Full scale flow rate
50, 100, 200 and 500
50, 100, 200 and 500sccm
Accuracy
0.2%FS or 2% SP
0.2%FS or 2% SP
Maximum operating pressure
10
10bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flow
Fluidic connector ports
Downmount
Downmount
Generic
Supply voltage
14 - 26.4
14 - 26.4V
Average supply current
50000
50000uA
Max. supply current
320000
320000uA
Interfaces
RS485
RS485
Size (LxWxH)
34 x 25 x 62.2
34 x 25 x 62.2mm

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