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Back to catalog

SFC6000D-50slm

Best price-performance ratio, distribution version, 50 slm

The SFC6000 mass flow controller is Sensirion’s next generation mass flow controller, impressing with an unbeatable priceperformance ratio and a very attractive delivery time of eight weeks. While the industry is currently struggling with delivery times of 30 to 53 weeks, SFC6000 samples are available within two to four weeks. In addition, selected SFC6000 configurations are available in distribution, meaning you can order them for initial testing and evaluation today and have the product in your mailbox tomorrow. 

 

The SFC6000 is very small and light and therefore allows the customer to optimize their devices in terms of size and weight. This is a decisive advantage, especially for portable devices. Furthermore, it offers great performance in terms of repeatability, accuracy, control range and speed. The SFC600 is highly integrated and has a very robust supply chain due to the very low number of electronic components used. 

 

Based on the thermal-mass measurement principle and using our proven CMOSens® MEMS technology, Sensirion builds radical mass flow controllers with best-in-class performance and speed, which, unlike most other devices on the market, do not drift and do not require in-service re-calibration. 

 

If you are looking for a mass flow meter, the SFM6000 is a valve-less sister variant of the SFC6000, offering the same performance at an even lower price. 

Applications: 

-Semiconductor: front opening unified pods (FOUP), glass coating and treatment 

-Analytical instruments: gas chromatography, bioreactors 

-Medical equipment: anesthesia, ventilation, heart-lung machines, N2O therapy 

-Industrial automation

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Specification

Mass flow
Full scale flow rate50slm50slm
Full scale flow rate50000sccm50000sccm
Accuracy0.2% FS or 2% SP0.2% FS or 2% SP
Maximum operating pressure10bar10bar
CalibrationAir, N₂, O₂, N₂O and Ar and CO₂flowAir, N₂, O₂, N₂O and Ar and CO₂flow
Fluidic connector portsPush-in 6mm, downmountPush-in 6mm, downmount
Generic
Supply voltage22.8 - 25.2V22.8 - 25.2V
Max. supply current210mA210mA
InterfacesI²C, RS485I²C, RS485
Size (LxWxH)102 x 45 x 20mm102 x 45 x 20mm

Downloads

Mass flow controllers brochure
  • 05/2024•
  • PDF•
  • 540.8 KB
FlyerDownload Mass flow controllers brochure05/2024Download Mass flow controllers brochurePDFDownload Mass flow controllers brochure540.8 KBDownload Mass flow controllers brochure
Mass flow controllers brochure Chinese
  • 06/2024•
  • PDF•
  • 633.9 KB
FlyerDownload Mass flow controllers brochure Chinese06/2024Download Mass flow controllers brochure ChinesePDFDownload Mass flow controllers brochure Chinese633.9 KBDownload Mass flow controllers brochure Chinese
Mass flow controllers brochure Japanese
  • 06/2024•
  • PDF•
  • 1.1 MB
FlyerDownload Mass flow controllers brochure Japanese06/2024Download Mass flow controllers brochure JapanesePDFDownload Mass flow controllers brochure Japanese1.1 MBDownload Mass flow controllers brochure Japanese
Datasheet SFC6000D/SFM6000D
  • 05/2023•
  • PDF•
  • 1.4 MB
DatasheetDownload Datasheet SFC6000D/SFM6000D05/2023Download Datasheet SFC6000D/SFM6000DPDFDownload Datasheet SFC6000D/SFM6000D1.4 MBDownload Datasheet SFC6000D/SFM6000D
Documentation I2C Interface SFC6000D and SFM6000D
  • 07/2023•
  • PDF•
  • 820.0 KB
Application noteDownload Documentation I2C Interface SFC6000D and SFM6000D07/2023Download Documentation I2C Interface SFC6000D and SFM6000DPDFDownload Documentation I2C Interface SFC6000D and SFM6000D820.0 KBDownload Documentation I2C Interface SFC6000D and SFM6000D
Exchange fittings SFC/SFM6000
  • 05/2023•
  • PDF•
  • 449.8 KB
Application noteDownload Exchange fittings SFC/SFM600005/2023Download Exchange fittings SFC/SFM6000PDFDownload Exchange fittings SFC/SFM6000449.8 KBDownload Exchange fittings SFC/SFM6000
Selection guide mass flow controllers
  • 11/2023•
  • PDF•
  • 347.8 KB
Application noteDownload Selection guide mass flow controllers11/2023Download Selection guide mass flow controllersPDFDownload Selection guide mass flow controllers347.8 KBDownload Selection guide mass flow controllers
SHDLC Interface Reference SFC6xxx and SFM6xxx RS485
  • 05/2023•
  • PDF•
  • 842.0 KB
Application noteDownload SHDLC Interface Reference SFC6xxx and SFM6xxx RS48505/2023Download SHDLC Interface Reference SFC6xxx and SFM6xxx RS485PDFDownload SHDLC Interface Reference SFC6xxx and SFM6xxx RS485842.0 KBDownload SHDLC Interface Reference SFC6xxx and SFM6xxx RS485
Quick start guide SFC/SFM6000 evaluation kit
  • 01/2023•
  • PDF•
  • 561.9 KB
GuideDownload Quick start guide SFC/SFM6000 evaluation kit01/2023Download Quick start guide SFC/SFM6000 evaluation kitPDFDownload Quick start guide SFC/SFM6000 evaluation kit561.9 KBDownload Quick start guide SFC/SFM6000 evaluation kit
SFX6000 Engineering Guide
  • 07/2023•
  • PDF•
  • 2.0 MB
GuideDownload SFX6000 Engineering Guide07/2023Download SFX6000 Engineering GuidePDFDownload SFX6000 Engineering Guide2.0 MBDownload SFX6000 Engineering Guide
STEP file SFC/SFM6000
  • 03/2023•
  • ZIP•
  • 10.6 MB
Drawings/CADDownload STEP file SFC/SFM600003/2023Download STEP file SFC/SFM6000ZIPDownload STEP file SFC/SFM600010.6 MBDownload STEP file SFC/SFM6000
REACH and RoHS declaration SFC
  • 04/2026•
  • PDF•
  • 99.9 KB
CertificateDownload REACH and RoHS declaration SFC04/2026Download REACH and RoHS declaration SFCPDFDownload REACH and RoHS declaration SFC99.9 KBDownload REACH and RoHS declaration SFC
  • All products
  • •Mass flow controllers
  • •SFC6000

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kitEK-F5xMass flow controllers

EK-F5x

Evaluation kit

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

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How to get started

Applications for this product

Mechanical ventilators

Precise and safe patient ventilation using ventilator flow sensors

Learn more

High-flow ventilators

Heated, humidified high-flow oxygen

Learn more

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