Versatile mass flow controller, via online distribution, 0.5 slm
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 0.5 | 0.5 | slm | |
| Full scale flow rate 500 | 500 | sccm | |
| Accuracy 0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
| Maximum operating pressure 5 | 5 | bar | |
| Calibration Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | flow | |
| Fluidic connector ports Legris | Legris |
| Generic | |||
|---|---|---|---|
| Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
| Average supply current 75000 | 75000 | uA | |
| Max. supply current 120000 | 120000 | uA | |
| Interfaces Device net, RS485 | Device net, RS485 | ||
| Size (LxWxH) 115 x 24.6 x 91 | 115 x 24.6 x 91 | mm |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |