SFC6000D-5slm
Out of stock Lead time: 12 weeks
Best price-performance ratio, distribution version, 5 slm
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate
5
| 5 | slm | |
| Full scale flow rate
5000
| 5000 | sccm | |
| Accuracy
0.2% FS or 2% SP
| 0.2% FS or 2% SP | ||
| Maximum operating pressure
10
| 10 | bar | |
| Calibration
Air, N₂, O₂, N₂O, Ar and CO₂
| Air, N₂, O₂, N₂O, Ar and CO₂ | flow | |
| Fluidic connector ports
Push-in 6mm, downmount
| Push-in 6mm, downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage
22.9 - 25.9
| 22.9 - 25.9 | V | |
| Max. supply current
210
| 210 | mA | |
| Interfaces
I²C, RS485
| I²C,RS485 | ||
| Size (LxWxH)
102 x 45 x 20
| 102 x 45 x 20 | mm³ |
Technical downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Download the respective viewer software to start measuring
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