Mass spectrometry

Controlled gas flow with high repeatability to ensure optimal instrument performance

Experience the difference with our sensors

Repeatable measurements for a robust instrument

Controlling flow injections accurately and repeatably is vital for producing reliable results and ensuring instrument robustness.

Controlled process through fast reaction time and low flow measurement

Sensirion’s mass flow controllers react within milliseconds, thus enabling a highly controlled process. Furthermore, flows as low as a few ml/min can be used.

Custom manifold solutions

Sensirion offers highly customizable solutions that seamlessly integrate into mass spectrometry in order to accurately measure and control gas flow.

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Discover our sensors

Upcoming 4

SFC6000-OEM

Great performance, low price and short lead time

Active 5

SFC5500

Versatile mass flow controller, via online distribution

Active 2

SFC5400

High performance and versatile mass flow controller

Find out why Sensirion should be a part of your solution

Innovation pioneer

With over 25 years of experience in flow sensing, we are aware of many challenges and know how to overcome them. Sensirion offers highly customizable solutions with various choices of materials, communication interfaces, fluidic designs and other specifications.