Gas flow sensors

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Sensirion’s gas flow sensors deliver accurate, bidirectional measurement and are fully calibrated and temperature compensated. No further calibration and no drift compensation are required. Built for high-volume production, our gas flow sensors have a track record of more than 20 years of proven industry experience. At the heart of each sensor lies our MEMS-based calorimetric microsensor, applying the thermal measurement principle. Trusted worldwide, our sensors enable innovation and reliability in applications that demand consistent and accurate gas flow measurement. Explore our gas flow sensor portfolio to find the right solution for your needs.

Filters
  • Series

    • SEK-SFMxxxx

      10

    • SFM3xxx

      15

    • SFM3xxx-AW/D

      6

    • SFM4xxx

      16

    • SFM5xxx

      8

    • SFM6000-OEM

      4

    • ASP1400

      0

    • EK-F5x

      0

    • EK-LD20xx

      0

    • EK-LPG10

      0

    • EK-Px

      0

    • EK-SLF3x

      0

    • EK-SLx

      0

    • ESS

      0

    • LD20

      0

    • LG01

      0

    • LG16

      0

    • LPG10

      0

    • LS32-1500

      0

    • SCC1

      0

    • SCC30-DB

      0

    • SCD30

      0

    • SCD4x

      0

    • SCD4x Gadget

      0

    • SDP1xxx

      0

    • SDP3x

      0

    • SDP5xx

      0

    • SDP6xx

      0

    • SDP8xx

      0

    • SDPxxx cap

      0

    • SEK-SCDxx

      0

    • SEK-SDP

      0

    • SEK-SEN5x

      0

    • SEK-SEN6x

      0

    • SEK-SensorBridge

      0

    • SEK-SFAxx

      0

    • SEK-SHTxx

      0

    • SEK-SPSxx

      0

    • SEK-STC31

      0

    • SEK-STCC4

      0

    • SEK-STS4x

      0

    • SEK-SVMxx

      0

    • SEN5x

      0

    • SEN6x

      0

    • SENSEVAL-SCB4XV1

      0

    • SENSEVAL-SHT4XV1

      0

    • SFA30

      0

    • SFA40

      0

    • SFC3x00

      0

    • SFC4x00

      0

    • SFC5300

      0

    • SFC5400

      0

    • SFC5500

      0

    • SFC6000

      0

    • SFx filter cap

      0

    • SGD43S-M3-Sx

      0

    • SGM53xx

      0

    • SGM63xx

      0

    • SGM64xx

      0

    • SGP30

      0

    • SGP4x

      0

    • SGPC3

      0

    • SHT1x

      0

    • SHT2x

      0

    • SHT31 Smart Gadget

      0

    • SHT3x

      0

    • SHT43 DemoBoard

      0

    • SHT4x

      0

    • SHT4xA

      0

    • SHT4xI

      0

    • SHT4x Smart Gadget

      0

    • SHT7x

      0

    • SHT85

      0

    • SHTCx

      0

    • SHTWx

      0

    • SLD3P

      0

    • SLF3S

      0

    • SLF3x

      0

    • SLG

      0

    • SLI

      0

    • SLQ-QT105

      0

    • SLQ-QT500

      0

    • SLS-1500

      0

    • SPS30

      0

    • STC31

      0

    • STC42x

      0

    • STCC4

      0

    • STS2x

      0

    • STS3x

      0

    • STS4x

      0

    • STS4xA

      0

    • SVM30

      0
  • Class

    • Evaluation kit

      11

    • Sensor

      48

    • Accessory

      0

    • Development board

      0

    • Reference design

      0
  • Product status

    • Upcoming

      4

    • New

      1

    • Active

      39

    • Not recommended for new designs

      15

    • Last time buy

      0

    • Obsolete

      0
  • Interface

    • I²C

      37

    • RS485

      12

    • Device net

      5

    • IO link

      1

    • Analog voltage

      4

    • Analog current

      1

    • Sensibus

      0

    • PWM

      0

    • SDM

      0

    • UART

      0

    • RS232

      0

    • Switch

      0

    • ModBus

      0
SFM3505-300-X
Upcoming

SFM3505-300-X

Next generation compact flow sensor, 1.5% m.v. accuracy

Full scale flow rate
-150 - 300 slm
Typical accuracy
1.5% m.v.
Calibration
Air and O₂
Maximum operating pressure
1.65 bar
Fluidic connector ports
O-Ring
Interfaces
I²C
Supply voltage
3.2 - 3.4 V
Size (LxWxH)
57.5 x 27.5 x 29.4 mm
  • Sensor
  • Gas flow sensors
SFM3505-300
Upcoming

SFM3505-300

Next generation compact flow sensor, 2.3% m.v. accuracy

Full scale flow rate
-150 - 300 slm
Typical accuracy
2.3% m.v.
Calibration
Air and O₂
Maximum operating pressure
1.65 bar
Fluidic connector ports
O-Ring
Interfaces
I²C
Supply voltage
3.2 - 3.4 V
Size (LxWxH)
57.5 x 27.5 x 29.4 mm
  • Sensor
  • Gas flow sensors
SEK-SFM3505
Upcoming

SEK-SFM3505

Gas flow sensor evaluation kit SFM3505

Enables the evaluation of any version of the SFM3505 sensor. 

Included: 

  • 1 cable compatible with the SFM3505 sensor and with Sensirion’s SensorBridge 

 

What you need additionally: 

  • Sensor to evaluate: SFM3505-300, SFM3505-300-X
  • Sensor bridge
  • Download Control Center 
  • Evaluation kit
  • Gas flow sensors
SEK-SFM3xxx-AW/D Evaluation Kit (Gen. 2)
Upcoming

SEK-SFM3xxx-AW/D Evaluation Kit (Gen. 2)

Gas flow sensors evaluation kit SFM3xxx-AW/D

Enables the evaluation of SFM3200-AW, SFM3300-AW/D and SFM3400-AW/D and the newest generation sensor SFM3304-D.
 

Included: 

1 cable with

  • Sensor side: a clip-on cap with microcontroller and pressure sensor
  • Computer side: a USB connector

 

Not included: 
Sensor to evaluate: SFM3200-AW, SFM3300-AW/D, SFM3400-AW/D or SFM3304-D

  • Evaluation kit
  • Gas flow sensors
SFM3304-D
New

SFM3304-D

Proximal single-use gas flow sensor in single packaging for OEM

Full scale flow rate
-250 - 250 slm
Typical accuracy
±3% m.v.
Calibration
-
Maximum operating pressure
1.14 bar
Fluidic connector ports
Medical cone (22 mm)
Interfaces
I²C
Supply voltage
3.15 - 3.45 V
Size (LxWxH)
69.3 x 25.3 x 22 mm
  • Sensor
  • Gas flow sensors
SFM6000-OEM

SFM6000-OEM

Best price-performance ratio, customizable version

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Analog voltage, I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
74 x 21 x 20 mm
  • Sensor
  • Gas flow sensors
SFM6000D-5slm

SFM6000D-5slm

Best price-performance ratio, distribution version, 5 slm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
74 x 40 x 20 mm
  • Sensor
  • Gas flow sensors
SFM6000D-50slm

SFM6000D-50slm

Best price-performance ratio, distribution version, 50 slm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
74 x 40 x 20 mm
  • Sensor
  • Gas flow sensors
SFM6000D-20slm

SFM6000D-20slm

Best price-performance ratio, distribution version, 20 slm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
74 x 40 x 20 mm
  • Sensor
  • Gas flow sensors
SFM5500-50sccm

SFM5500-50sccm

High-pressure mass flow meter for multiple gases, 50 sccm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Gas flow sensors
SFM5500-2slm

SFM5500-2slm

High-pressure mass flow meter for multiple gases, 2 slm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Gas flow sensors
SFM5500-10slm

SFM5500-10slm

High-pressure mass flow meter for multiple gases, 10 slm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Gas flow sensors
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