Precise dosing when applying photoresist
How our sensors make a difference
Precise dosing
Sensirion liquid flow sensors can measure tiny currents of photoresists. This enables precise dosing of photoresist material in the manufacture of semiconductors.
Continuous monitoring
Real-time measurement enables continuous monitoring of the manufacturing process. Changes in the quality of the process are reliably detected and manufacturing errors can be prevented by early intervention.
Made for Semicon
The sensors are suitable for semiconductor applications and meet all requirements for compatibility, quality and reliability.
Why Sensirion should be part of your solution
Used in leading facilities
Leading semiconductor companies worldwide rely on our liquid flow sensors for photoresist dosing and monitoring in their spin coating facilities.
Discover related sensors
SLQ-QT105
High purity liquid flow sensor for hydrocarbons at up to 120 ml/min
- Sensor
- Liquid flow
SLQ-QT500
Measurement of highly viscous liquids with up to 120 ml/min
- Sensor
- Liquid flow
