Versatile mass flow controller, via online distribution, 200 slm
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate200slm | 200 | slm | |
| Full scale flow rate200000sccm | 200000 | sccm | |
| Accuracy0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
| Maximum operating pressure5bar | 5 | bar | |
| CalibrationAir, O2 and N2flow | Air, O2 and N2 | flow | |
| Fluidic connector portsLegris | Legris |
| Generic | |||
|---|---|---|---|
| Supply voltage14 - 26.4V | 14 - 26.4 | V | |
| Average supply current200000uA | 200000 | uA | |
| Max. supply current320000uA | 320000 | uA | |
| InterfacesDevice net, RS485 | Device net, RS485 | ||
| Size (LxWxH)135 x 24.6 x 91mm | 135 x 24.6 x 91 | mm |
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.