Versatile mass flow controller, via online distribution, 200 slm
Mass flow | |||
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Full scale flow rate 200 | 200 | slm | |
Full scale flow rate 200000 | 200000 | sccm | |
Accuracy 0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
Maximum operating pressure 5 | 5 | bar | |
Calibration Air, O2 and N2 | Air, O2 and N2 | flow | |
Fluidic connector ports Legris | Legris |
Generic | |||
---|---|---|---|
Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
Average supply current 200000 | 200000 | uA | |
Max. supply current 320000 | 320000 | uA | |
Interfaces Device net, RS485 | Device net, RS485 | ||
Size (LxWxH) 135 x 24.6 x 91 | 135 x 24.6 x 91 | mm |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
![]() | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.