Liquid flow sensors

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Our liquid flow sensors establish new standards wherever monitoring of low liquid flow rates, liquid handling and liquid dispensing is important. Our unique CMOSens® Technology allows bidirectional flow detection through the sensor channel, covering ranges from hundreds of milliliters per minute down to single-digit nanoliters per minute. Applications in fields like medical devices, diagnostics and process and automation technology benefit from our safe, accurate and reliable sensor solutions. Discover our liquid flow sensor portfolio and find the right fit for your application.

Filters
  • Series

    • EK-LD20xx

      2

    • EK-LPG10

      1

    • EK-SLF3x

      2

    • EK-SLx

      6

    • LD20

      2

    • LG01

      2

    • LG16

      14

    • LPG10

      2

    • LS32-1500

      1

    • SCC1

      5

    • SLD3P

      1

    • SLF3S

      2

    • SLF3x

      7

    • SLG

      3

    • SLI

      3

    • SLQ-QT105

      1

    • SLQ-QT500

      1

    • SLS-1500

      1

    • ASP1400

      0

    • EK-F5x

      0

    • EK-Px

      0

    • ESS

      0

    • SCC30-DB

      0

    • SCD30

      0

    • SCD4x

      0

    • SCD4x Gadget

      0

    • SDP1xxx

      0

    • SDP3x

      0

    • SDP5xx

      0

    • SDP6xx

      0

    • SDP8xx

      0

    • SDPxxx cap

      0

    • SEK-SCDxx

      0

    • SEK-SDP

      0

    • SEK-SEN5x

      0

    • SEK-SEN6x

      0

    • SEK-SensorBridge

      0

    • SEK-SFAxx

      0

    • SEK-SFMxxxx

      0

    • SEK-SHTxx

      0

    • SEK-SPSxx

      0

    • SEK-STC31

      0

    • SEK-STCC4

      0

    • SEK-STS4x

      0

    • SEK-SVMxx

      0

    • SEN5x

      0

    • SEN6x

      0

    • SENSEVAL-SCB4XV1

      0

    • SENSEVAL-SHT4XV1

      0

    • SFA30

      0

    • SFA40

      0

    • SFC3x00

      0

    • SFC4x00

      0

    • SFC5300

      0

    • SFC5400

      0

    • SFC5500

      0

    • SFC6000

      0

    • SFM3xxx

      0

    • SFM3xxx-AW/D

      0

    • SFM4xxx

      0

    • SFM5xxx

      0

    • SFM6000-OEM

      0

    • SFx filter cap

      0

    • SGD43S-M3-Sx

      0

    • SGM53xx

      0

    • SGM63xx

      0

    • SGM64xx

      0

    • SGP30

      0

    • SGP4x

      0

    • SGPC3

      0

    • SHT1x

      0

    • SHT2x

      0

    • SHT31 Smart Gadget

      0

    • SHT3x

      0

    • SHT43 DemoBoard

      0

    • SHT4x

      0

    • SHT4xA

      0

    • SHT4xI

      0

    • SHT4x Smart Gadget

      0

    • SHT7x

      0

    • SHT85

      0

    • SHTCx

      0

    • SHTWx

      0

    • SPS30

      0

    • STC31

      0

    • STC42x

      0

    • STCC4

      0

    • STS2x

      0

    • STS3x

      0

    • STS4x

      0

    • STS4xA

      0

    • SVM30

      0
  • Class

    • Accessory

      9

    • Evaluation kit

      13

    • Sensor

      34

    • Development board

      0

    • Reference design

      0
  • Product status

    • Upcoming

      3

    • Active

      35

    • Not recommended for new designs

      4

    • Obsolete

      14

    • New

      0

    • Last time buy

      0
  • Interface

    • I²C

      36

    • UART

      1

    • RS485

      27

    • Switch

      2

    • Analog voltage

      24

    • Analog current

      19

    • Sensibus

      0

    • PWM

      0

    • SDM

      0

    • RS232

      0

    • Device net

      0

    • IO link

      0

    • ModBus

      0
SLF3S-1300D
Upcoming

SLF3S-1300D

Manifold mount liquid flow up to 40 ml/min

Full scale flow rate(H2O)
40 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
12 bar
Fluidic connector ports
Downmount
Interfaces
I²C, RS485
Supply voltage
3.2 - 3.8 V
Average supply current
-
  • Sensor
  • Liquid flow sensors
SLF3S-0600D
Upcoming

SLF3S-0600D

Manifold mount liquid flow up to 2 ml/min

Full scale flow rate(H2O)
2 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
12 bar
Fluidic connector ports
Downmount
Interfaces
I²C, RS485
Supply voltage
3.2 - 3.8 V
Average supply current
-
  • Sensor
  • Liquid flow sensors
SLD3P
Upcoming

SLD3P

Liquid flow measurement up to 5 ml/min in medical applications

Full scale flow rate(H2O)
5 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
3 bar
Fluidic connector ports
Downmount
Interfaces
I²C
Supply voltage
3.2 - 3.8 V
Average supply current
-
  • Sensor
  • Liquid flow sensors
SLS-1500

SLS-1500

Versatile and robust sensor for standalone laboratory setups

Full scale flow rate(H2O)
40 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
12 bar
Fluidic connector ports
1/4-28 flat bottom
Interfaces
Analog voltage, Analog current, I²C, RS485
Supply voltage
4 - 6 V
Average supply current
5.1 mA
  • Sensor
  • Liquid flow sensors
SLQ-QT500

SLQ-QT500

Measurement of highly viscous liquids with up to 120 ml/min

Full scale flow rate(H2O)
120 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
12 bar
Fluidic connector ports
1/4 tubing
Interfaces
Analog voltage, Analog current, I²C, RS485
Supply voltage
3.3 - 3.7 V
Average supply current
5.1 mA
  • Sensor
  • Liquid flow sensors
SLQ-QT105

SLQ-QT105

High purity liquid flow sensor for hydrocarbons at up to 120 ml/min

Full scale flow rate(H2O)
-
Accuracy(H2O)
-
Repeatability(H2O)
-
Maximum operating pressure
12 bar
Fluidic connector ports
Super 300 type pillar fitting 4x3
Interfaces
Analog voltage, Analog current, I²C, RS485
Supply voltage
4.5 - 5.5 V
Average supply current
20 mA
  • Sensor
  • Liquid flow sensors
SLI-2000

SLI-2000

Demanding applications across industries at up to 5 ml/min

Full scale flow rate(H2O)
5 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
15 bar
Fluidic connector ports
1/4-28 flat bottom
Interfaces
Analog voltage, Analog current, I²C, RS485
Supply voltage
4 - 6 V
Average supply current
6.8 mA
  • Sensor
  • Liquid flow sensors
SLI-1000

SLI-1000

Demanding applications across industries at up to 1 ml/min

Full scale flow rate(H2O)
1 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
15 bar
Fluidic connector ports
1/4-28 flat bottom
Interfaces
Analog voltage, Analog current, I²C, RS485
Supply voltage
4 - 6 V
Average supply current
6.8 mA
  • Sensor
  • Liquid flow sensors
SLI-0430

SLI-0430

Demanding applications across industries at up to 80 µl/min

Full scale flow rate(H2O)
80 ul/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
50 bar
Fluidic connector ports
1/4-28 flat bottom
Interfaces
Analog voltage, Analog current, I²C, RS485
Supply voltage
4 - 6 V
Average supply current
6.8 mA
  • Sensor
  • Liquid flow sensors
SLG-0075

SLG-0075

Ultra-low flow rates and UHPLC applications up to 5 µl/min

Full scale flow rate(H2O)
5 ul/min
Accuracy(H2O)
10 %
Repeatability(H2O)
0.6 %
Maximum operating pressure
1200 bar
Fluidic connector ports
10-32 coned port
Interfaces
Analog voltage, Analog current, I²C, RS485
Supply voltage
4 - 6 V
Average supply current
5.1 mA
  • Sensor
  • Liquid flow sensors
SLF3S-4000B

SLF3S-4000B

Liquid flow sensing on a new level: flow rates up to 600 ml/min

Full scale flow rate(H2O)
600 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
3 bar
Fluidic connector ports
Barbed fittings
Interfaces
I²C, RS485
Supply voltage
3.2 - 3.8 V
Average supply current
-
  • Sensor
  • Liquid flow sensors
SLF3S-1300F

SLF3S-1300F

Next generation in liquid flow sensing up to 40 ml/min

Full scale flow rate(H2O)
40 ml/min
Accuracy(H2O)
5 %
Repeatability(H2O)
0.5 %
Maximum operating pressure
12 bar
Fluidic connector ports
1/4-28 flat bottom
Interfaces
I²C, RS485
Supply voltage
3.2 - 3.8 V
Average supply current
-
  • Sensor
  • Liquid flow sensors
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