SFC5300
MFC for cost-sensitive OEM projects with high unit quantities
The SFC5300 mass flow controller measures and control mass flows with outstanding accuracy, long-term stability and repeatability. It boasts a compact size and an impressive dynamic measurement range. The body housing of the SFC5300 is metal. The SFC5300 mass flow controller is available with downmount connections and two digital interfaces. The SFC5300 is the smaller variant of the SFC5400 mass flow controller and is for cost-sensitive OEM projects with high unit quantities. As all Sensirion sensors, the outstanding performance of the SFC5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFC5300 mass flow controller. The SFC5300 mass flow controller is available as valve-free version too. The two sensor products have the same performance characteristics and are used in similar applications, meaning they can be ideally combined. You can find further information and detailed specifications about the mass flow meter on the SFM5300 website. For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate
1, 2, 5 and 10
| 1, 2, 5 and 10 | slm | |
| Full scale flow rate
50, 100, 200 and 500
| 50, 100, 200 and 500 | sccm | |
| Accuracy
0.2%FS or 2% SP
| 0.2%FS or 2% SP | ||
| Maximum operating pressure
10
| 10 | bar | |
| Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
| Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| Fluidic connector ports
Downmount
| Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage
14 - 26.4
| 14 - 26.4 | V | |
| Average supply current
50000
| 50000 | uA | |
| Max. supply current
320000
| 320000 | uA | |
| Interfaces
RS485
| RS485 | ||
| Size (LxWxH)
48 x 25 x 79.5
| 48 x 25 x 79.5 | mm³ |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Download the respective viewer software to start measuring
Go to download centerStart testing our sensors fast and easy with the evaluation kits
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