Versatile mass flow controller, via online distribution, 50sccm
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate0.05slm | 0.05 | slm | |
| Full scale flow rate50sccm | 50 | sccm | |
| Accuracy0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| Maximum operating pressure5bar | 5 | bar | |
| CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4 and N2Oflow | Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | flow | |
| Fluidic connector portsLegris | Legris |
| Generic | |||
|---|---|---|---|
| Supply voltage14 - 26.4V | 14 - 26.4 | V | |
| Average supply current75000uA | 75000 | uA | |
| Max. supply current120000uA | 120000 | uA | |
| InterfacesDevice net, RS485 | Device net, RS485 | ||
| Size (LxWxH)105 x 38.5 x 90.5mm | 105 x 38.5 x 90.5 | mm |
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.