Mass flow | |||
---|---|---|---|
Full scale flow rate
0.05
| 0.05 | slm | |
Full scale flow rate
50
| 50 | sccm | |
Accuracy
0.2%FS or 2% SP
| 0.2%FS or 2% SP | ||
Maximum operating pressure
10
| 10 | bar | |
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O
| Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | flow | |
Fluidic connector ports
Legris
| Legris |
Generic | |||
---|---|---|---|
Supply voltage
14 - 26.4
| 14 - 26.4 | V | |
Average supply current
75000
| 75000 | uA | |
Max. supply current
120000
| 120000 | uA | |
Interfaces
Device net, RS485
| Device net,RS485 | ||
Size (LxWxH)
105 x 38.5 x 90.5
| 105 x 38.5 x 90.5 | mm³ |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.