SFC5500 mass flow controller series represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow controller with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration. Thanks to the exceptionally high control range enabled by the CMOSens® MEMS flow sensor, SFC5500 series can cover multiple flow ranges of a traditional mass flow controller in a single device. Coupled with multi-gas calibration and exchangeable fittings, SFC5500 series are the first mass flow controllers on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFC5500 series are also the first mass flow controllers available via catalogue distribution. SFC5500 series complements the SFC5xxx family of Sensirion’s best-in-class mass flow Controllers, offering the same top performance as SFC5400 and is thus suited for a broad range of applications where best accuracy, highest speed and widest dynamic range are needed. However, unlike the highly configurable SFC5400 series, SFC5500 series mass flow controllers are available in several standard pre-configured variants. For other gases, flow ranges, fittings and interfaces please check SFC5400, or Sensirion’s most cost-efficient solution for large OEM projects – SFC5300. If you are looking for a mass flow meter, SFM5500 is a valve-less sister variant of SFC5500 offering the same great performance.
Mass flow | |||
---|---|---|---|
Full scale flow rate
0.05
| 0.05 | slm | |
Full scale flow rate
50
| 50 | sccm | |
Accuracy
0.2%FS or 2% SP
| 0.2%FS or 2% SP | ||
Maximum operating pressure
10
| 10 | bar | |
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O
| Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | flow | |
Fluidic connector ports
Legris
| Legris |
Generic | |||
---|---|---|---|
Supply voltage
14 - 26.4
| 14 - 26.4 | V | |
Average supply current
75000
| 75000 | uA | |
Max. supply current
120000
| 120000 | uA | |
Interfaces
Device net, RS485
| Device net,RS485 | ||
Size (LxWxH)
105 x 38.5 x 90.5
| 105 x 38.5 x 90.5 | mm³ |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.