Versatile MFC for OEM projects with high unit quantities
Mass flow | |||
---|---|---|---|
Full scale flow rate 0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm | 0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm | slm | |
Full scale flow rate 20 and 50 and 100 sccm | 20 and 50 and 100 sccm | sccm | |
Accuracy 0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
Maximum operating pressure 5 | 5 | bar | |
Calibration Air, H2, O2, He, Ar, CO2 and N2 and O2 flow | Air, H2, O2, He, Ar, CO2 and N2 and O2 flow | flow | |
Fluidic connector ports Swagelok, VCR, VCO, W-Seal, Downmount | Swagelok, VCR, VCO, W-Seal, Downmount |
Generic | |||
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Supply voltage 14 - 26 | 14 - 26 | V | |
Average supply current 50000 | 50000 | uA | |
Max. supply current 320000 | 320000 | uA | |
Interfaces RS485 | RS485 | ||
Size (LxWxH) 101.1 x 24.4 x 91 | 101.1 x 24.4 x 91 | mm |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
![]() | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.