Versatile MFC for OEM projects with high unit quantities
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slmslm | 0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm | slm | |
| Full scale flow rate20 and 50 and 100 sccmsccm | 20 and 50 and 100 sccm | sccm | |
| Accuracy0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
| Maximum operating pressure5bar | 5 | bar | |
| CalibrationAir, H2, O2, He, Ar, CO2 and N2 and O2 flowflow | Air, H2, O2, He, Ar, CO2 and N2 and O2 flow | flow | |
| Fluidic connector portsSwagelok, VCR, VCO, W-Seal, Downmount | Swagelok, VCR, VCO, W-Seal, Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage14 - 26V | 14 - 26 | V | |
| Average supply current50000uA | 50000 | uA | |
| Max. supply current320000uA | 320000 | uA | |
| InterfacesRS485 | RS485 | ||
| Size (LxWxH)101.1 x 24.4 x 91mm | 101.1 x 24.4 x 91 | mm |
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.