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SFC5460

  • All products
  • •Mass flow controllers
  • •SFC5400

Versatile MFC for OEM projects with high unit quantities

The SFC5400 mass flow controller measures and controls mass flows with outstanding accuracy, long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFC5400 highly configurable and its body housing is made of metal. Furthermore, the flow controller is available with various interfaces and a variety of fluidic connections and measures maximum flow rates from 50 sccm up to 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow controller can check whether the activated gas calibration matches the actual gas present. The versatility of the SFC5400 makes it the ideal solution for industrial and medical applications. The SFC5400 mass flow controller is, as all sensor products, based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip and guarantees an outstanding performance. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow controller. The SFC5400 mass flow controller is available as valve-free version too. The SFM5400 mass flow meter has the same performance characteristics as the mass flow controller and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFM5400 website. For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.
Contact sales

Specification

Mass flow
Full scale flow rate0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slmslm0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slmslm
Full scale flow rate20 and 50 and 100 sccmsccm20 and 50 and 100 sccmsccm
Accuracy0.08% FS or 0.8% SP0.08% FS or 0.8% SP
Maximum operating pressure5bar5bar
CalibrationAir, H2, O2, He, Ar, CO2 and N2 and O2 flowflowAir, H2, O2, He, Ar, CO2 and N2 and O2 flowflow
Fluidic connector portsSwagelok, VCR, VCO, W-Seal, DownmountSwagelok, VCR, VCO, W-Seal, Downmount
Generic
Supply voltage14 - 26V14 - 26V
Average supply current50000uA50000uA
Max. supply current320000uA320000uA
InterfacesRS485RS485
Size (LxWxH)101.1 x 24.4 x 91mm101.1 x 24.4 x 91mm

Downloads

Datasheet SFC5460/SFM5460
  • 05/2023•
  • PDF•
  • 771.3 KB
DatasheetDownload Datasheet SFC5460/SFM546005/2023Download Datasheet SFC5460/SFM5460PDFDownload Datasheet SFC5460/SFM5460771.3 KBDownload Datasheet SFC5460/SFM5460
STEP file downmount SFC5460/SFM5460
  • 08/2022•
  • STEP•
  • 25.2 MB
Drawings/CADDownload STEP file downmount SFC5460/SFM546008/2022Download STEP file downmount SFC5460/SFM5460STEPDownload STEP file downmount SFC5460/SFM546025.2 MBDownload STEP file downmount SFC5460/SFM5460
Mass flow controllers brochure
  • 05/2024•
  • PDF•
  • 540.8 KB
FlyerDownload Mass flow controllers brochure05/2024Download Mass flow controllers brochurePDFDownload Mass flow controllers brochure540.8 KBDownload Mass flow controllers brochure
Mass flow controllers brochure Chinese
  • 06/2024•
  • PDF•
  • 633.9 KB
FlyerDownload Mass flow controllers brochure Chinese06/2024Download Mass flow controllers brochure ChinesePDFDownload Mass flow controllers brochure Chinese633.9 KBDownload Mass flow controllers brochure Chinese
Mass flow controllers brochure Japanese
  • 06/2024•
  • PDF•
  • 1.1 MB
FlyerDownload Mass flow controllers brochure Japanese06/2024Download Mass flow controllers brochure JapanesePDFDownload Mass flow controllers brochure Japanese1.1 MBDownload Mass flow controllers brochure Japanese
Engineering guide SFC5xxx/SFM5xxx
  • 07/2023•
  • PDF•
  • 869.9 KB
Application noteDownload Engineering guide SFC5xxx/SFM5xxx07/2023Download Engineering guide SFC5xxx/SFM5xxxPDFDownload Engineering guide SFC5xxx/SFM5xxx869.9 KBDownload Engineering guide SFC5xxx/SFM5xxx
Mean time between failures analysis
  • 08/2022•
  • PDF•
  • 202.9 KB
Application noteDownload Mean time between failures analysis08/2022Download Mean time between failures analysisPDFDownload Mean time between failures analysis202.9 KBDownload Mean time between failures analysis
Reference and flow conversions
  • 09/2021•
  • PDF•
  • 293.7 KB
Application noteDownload Reference and flow conversions09/2021Download Reference and flow conversionsPDFDownload Reference and flow conversions293.7 KBDownload Reference and flow conversions
Selection guide mass flow controllers
  • 11/2023•
  • PDF•
  • 347.8 KB
Application noteDownload Selection guide mass flow controllers11/2023Download Selection guide mass flow controllersPDFDownload Selection guide mass flow controllers347.8 KBDownload Selection guide mass flow controllers
SHDLC Interface Reference SFM5xxx/SFC5xxx
  • PDF•
  • 665.2 KB
Application noteDownload SHDLC Interface Reference SFM5xxx/SFC5xxxDownload SHDLC Interface Reference SFM5xxx/SFC5xxxPDFDownload SHDLC Interface Reference SFM5xxx/SFC5xxx665.2 KBDownload SHDLC Interface Reference SFM5xxx/SFC5xxx
Quick start guide SFC5xxx/SFM5xxx
  • 09/2021•
  • PDF•
  • 369.3 KB
GuideDownload Quick start guide SFC5xxx/SFM5xxx09/2021Download Quick start guide SFC5xxx/SFM5xxxPDFDownload Quick start guide SFC5xxx/SFM5xxx369.3 KBDownload Quick start guide SFC5xxx/SFM5xxx
Recalibration tool SFC5xxx/SFM5xxx
  • 07/2022•
  • PDF•
  • 1002.3 KB
GuideDownload Recalibration tool SFC5xxx/SFM5xxx07/2022Download Recalibration tool SFC5xxx/SFM5xxxPDFDownload Recalibration tool SFC5xxx/SFM5xxx1002.3 KBDownload Recalibration tool SFC5xxx/SFM5xxx
Software manual SFC5xxx/SFM5xxx
  • PDF•
  • 1.3 MB
GuideDownload Software manual SFC5xxx/SFM5xxxDownload Software manual SFC5xxx/SFM5xxxPDFDownload Software manual SFC5xxx/SFM5xxx1.3 MBDownload Software manual SFC5xxx/SFM5xxx
Python driver SFC5xxx/SFM5xxx
  • Link•
SoftwareDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxxLinkDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxx
Recalibration tool software SFC5xxx/SFM5xxx
  • 06/2022•
  • File•
SoftwareDownload Recalibration tool software SFC5xxx/SFM5xxx06/2022Download Recalibration tool software SFC5xxx/SFM5xxxFileDownload Recalibration tool software SFC5xxx/SFM5xxxDownload Recalibration tool software SFC5xxx/SFM5xxx
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
  • 03/2022•
  • ZIP•
  • 1.7 MB
SoftwareDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx03/2022Download Software library LabVIEW, C, C# SFC5xxx/SFM5xxxZIPDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx1.7 MBDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software SFC5xxx/SFM5xxx
  • 04/2022•
  • ZIP•
  • 1.1 MB
SoftwareDownload Software SFC5xxx/SFM5xxx04/2022Download Software SFC5xxx/SFM5xxxZIPDownload Software SFC5xxx/SFM5xxx1.1 MBDownload Software SFC5xxx/SFM5xxx
Mounting Plate SFX54xx
  • 07/2022•
  • STEP•
  • 168.2 KB
Drawings/CADDownload Mounting Plate SFX54xx07/2022Download Mounting Plate SFX54xxSTEPDownload Mounting Plate SFX54xx168.2 KBDownload Mounting Plate SFX54xx
REACH and RoHS declaration SFC
  • 04/2026•
  • PDF•
  • 99.9 KB
CertificateDownload REACH and RoHS declaration SFC04/2026Download REACH and RoHS declaration SFCPDFDownload REACH and RoHS declaration SFC99.9 KBDownload REACH and RoHS declaration SFC

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kitEK-F5xMass flow controllers

EK-F5x

Evaluation kit

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

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Applications for this product

Mechanical ventilators

Precise and safe patient ventilation using ventilator flow sensors

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