SFC5460

Versatile MFC for OEM projects with high unit quantities

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Specification

Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm slm
Full scale flow rate
20 and 50 and 100 sccm
20 and 50 and 100 sccm sccm
Accuracy
0.08% FS or 0.8% SP
0.08% FS or 0.8% SP
Maximum operating pressure
5
5 bar
Calibration
Air, H2, O2, He, Ar, CO2 and N2 and O2 flow
Air, H2, O2, He, Ar, CO2 and N2 and O2 flow flow
Fluidic connector ports
Swagelok, VCR, VCO, W-Seal, Downmount
Swagelok, VCR, VCO, W-Seal, Downmount
Generic
Supply voltage
14 - 26
14 - 26 V
Average supply current
50000
50000 uA
Max. supply current
320000
320000 uA
Interfaces
RS485
RS485
Size (LxWxH)
101.1 x 24.4 x 91
101.1 x 24.4 x 91 mm³

Downloads

Name Type Date File Size
Datasheet SFC5460/SFM5460

05/2023

File

771.3 KB

Datasheet 05/2023 PDF 771.3 KB
STEP file downmount SFC5460/SFM5460

08/2022

File

25.2 MB

Drawings/CAD 08/2022 STEP 25.2 MB
Engineering guide SFC5xxx/SFM5xxx

07/2023

File

869.9 KB

Application note 07/2023 PDF 869.9 KB
Mean time between failures analysis

08/2022

File

202.9 KB

Application note 08/2022 PDF 202.9 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note 09/2021 PDF 293.7 KB
Selection guide mass flow controllers

11/2023

File

347.8 KB

Application note 11/2023 PDF 347.8 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx

02/2022

File

665.2 KB

Application note 02/2022 PDF 665.2 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

Guide 09/2021 PDF 369.3 KB
Recalibration tool SFC5xxx/SFM5xxx

07/2022

File

1002.3 KB

Guide 07/2022 PDF 1002.3 KB
Software manual SFC5xxx/SFM5xxx

03/2022

File

1.3 MB

Guide 03/2022 PDF 1.3 MB
Python driver SFC5xxx/SFM5xxx

03/2022

Link

-

Software 03/2022 Link -
Recalibration tool software SFC5xxx/SFM5xxx

06/2022

File

-

Software 06/2022 File -
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software 03/2022 ZIP 1.7 MB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Software 04/2022 ZIP 1.1 MB
Mounting Plate SFX54xx

07/2022

File

168.2 KB

Drawings/CAD 07/2022 STEP 168.2 KB
REACH and RoHS declaration SFC

07/2024

File

90.6 KB

Certificate 07/2024 PDF 90.6 KB
Mass flow controllers brochure

05/2024

File

540.8 KB

Flyer 05/2024 PDF 540.8 KB

Sensor evaluation

Buy the following products to evaluate this sensor

Name Description Series Category
EK-F5x
Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... EK-F5x Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

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Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.