Versatile mass flow controller, via online distribution, 2 slm
Mass flow | |||
---|---|---|---|
Full scale flow rate 2 | 2 | slm | |
Full scale flow rate 2000 | 2000 | sccm | |
Accuracy 0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
Maximum operating pressure 8 | 8 | bar | |
Calibration Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | flow | |
Fluidic connector ports Legris | Legris |
Generic | |||
---|---|---|---|
Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
Average supply current 200000 | 200000 | uA | |
Max. supply current 320000 | 320000 | uA | |
Interfaces Device net, RS485 | Device net, RS485 | ||
Size (LxWxH) 105 x 38.5 x 90.5 | 105 x 38.5 x 90.5 | mm |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
![]() | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.