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SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

SFC5500 mass flow controller series represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow controller with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration. Thanks to the exceptionally high control range enabled by the CMOSens® MEMS flow sensor, SFC5500 series can cover multiple flow ranges of a traditional mass flow controller in a single device. Coupled with multi-gas calibration and exchangeable fittings, SFC5500 series are the first mass flow controllers on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFC5500 series are also the first mass flow controllers available via catalogue distribution. SFC5500 series complements the SFC5xxx family of Sensirion’s best-in-class mass flow Controllers, offering the same top performance as SFC5400 and is thus suited for a broad range of applications where best accuracy, highest speed and widest dynamic range are needed. However, unlike the highly configurable SFC5400 series, SFC5500 series mass flow controllers are available in several standard pre-configured variants. For other gases, flow ranges, fittings and interfaces please check SFC5400, or Sensirion’s most cost-efficient solution for large OEM projects – SFC5300. If you are looking for a mass flow meter, SFM5500 is a valve-less sister variant of SFC5500 offering the same great performance.
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Specification

Mass flow
Full scale flow rate2slm2slm
Full scale flow rate2000sccm2000sccm
Accuracy0.08% FS or 0.8% SP0.08% FS or 0.8% SP
Maximum operating pressure5bar5bar
CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4 and N2OflowAir, O2, N2, Ar, CO2, He, H2, CH4 and N2Oflow
Fluidic connector portsLegrisLegris
Generic
Supply voltage14 - 26.4V14 - 26.4V
Average supply current200000uA200000uA
Max. supply current320000uA320000uA
InterfacesDevice net, RS485Device net, RS485
Size (LxWxH)105 x 38.5 x 90.5mm

Downloads

Datasheet SFC5500/SFM5500
  • 02/2024•
  • PDF•
  • 975.3 KB
DatasheetDownload Datasheet SFC5500/SFM550002/2024Download Datasheet SFC5500/SFM5500PDFDownload Datasheet SFC5500/SFM5500975.3 KBDownload Datasheet SFC5500/SFM5500
Compatible fittings SFC5500/SFM5500
  • 10/2022•
  • PDF•
  • 193.4 KB
Application noteDownload Compatible fittings SFC5500/SFM550010/2022Download Compatible fittings SFC5500/SFM5500PDFDownload Compatible fittings SFC5500/SFM5500193.4 KBDownload Compatible fittings SFC5500/SFM5500
STEP file SFC5500-50sccm/0.5slm/2slm/10slm
  • 04/2022•
  • STEP•
  • 3.4 MB
Drawings/CADDownload STEP file SFC5500-50sccm/0.5slm/2slm/10slm04/2022Download STEP file SFC5500-50sccm/0.5slm/2slm/10slmSTEPDownload STEP file SFC5500-50sccm/0.5slm/2slm/10slm3.4 MBDownload STEP file SFC5500-50sccm/0.5slm/2slm/10slm
Mass flow controllers brochure
  • 05/2024•
  • PDF•
  • 540.8 KB
FlyerDownload Mass flow controllers brochure05/2024Download Mass flow controllers brochurePDFDownload Mass flow controllers brochure540.8 KBDownload Mass flow controllers brochure
Mass flow controllers brochure Chinese
  • 06/2024•
  • PDF•
  • 633.9 KB
FlyerDownload Mass flow controllers brochure Chinese06/2024Download Mass flow controllers brochure ChinesePDFDownload Mass flow controllers brochure Chinese633.9 KBDownload Mass flow controllers brochure Chinese
Mass flow controllers brochure Japanese
  • 06/2024•
  • PDF•
  • 1.1 MB
FlyerDownload Mass flow controllers brochure Japanese06/2024Download Mass flow controllers brochure JapanesePDFDownload Mass flow controllers brochure Japanese1.1 MBDownload Mass flow controllers brochure Japanese
Engineering guide SFC5xxx/SFM5xxx
  • 07/2023•
  • PDF•
  • 869.9 KB
Application noteDownload Engineering guide SFC5xxx/SFM5xxx07/2023Download Engineering guide SFC5xxx/SFM5xxxPDFDownload Engineering guide SFC5xxx/SFM5xxx869.9 KBDownload Engineering guide SFC5xxx/SFM5xxx
Mean time between failures analysis
  • 08/2022•
  • PDF•
  • 202.9 KB
Application noteDownload Mean time between failures analysis08/2022Download Mean time between failures analysisPDFDownload Mean time between failures analysis202.9 KBDownload Mean time between failures analysis
Reference and flow conversions
  • 09/2021•
  • PDF•
  • 293.7 KB
Application noteDownload Reference and flow conversions09/2021Download Reference and flow conversionsPDFDownload Reference and flow conversions293.7 KBDownload Reference and flow conversions
Selection guide mass flow controllers
  • 11/2023•
  • PDF•
  • 347.8 KB
Application noteDownload Selection guide mass flow controllers11/2023Download Selection guide mass flow controllersPDFDownload Selection guide mass flow controllers347.8 KBDownload Selection guide mass flow controllers
SHDLC Interface Reference SFM5xxx/SFC5xxx
  • PDF•
  • 665.2 KB
Application noteDownload SHDLC Interface Reference SFM5xxx/SFC5xxxDownload SHDLC Interface Reference SFM5xxx/SFC5xxxPDFDownload SHDLC Interface Reference SFM5xxx/SFC5xxx665.2 KBDownload SHDLC Interface Reference SFM5xxx/SFC5xxx
Quick start guide SFC5xxx/SFM5xxx
  • 09/2021•
  • PDF•
  • 369.3 KB
GuideDownload Quick start guide SFC5xxx/SFM5xxx09/2021Download Quick start guide SFC5xxx/SFM5xxxPDFDownload Quick start guide SFC5xxx/SFM5xxx369.3 KBDownload Quick start guide SFC5xxx/SFM5xxx
Recalibration tool SFC5xxx/SFM5xxx
  • 07/2022•
  • PDF•
  • 1002.3 KB
GuideDownload Recalibration tool SFC5xxx/SFM5xxx07/2022Download Recalibration tool SFC5xxx/SFM5xxxPDFDownload Recalibration tool SFC5xxx/SFM5xxx1002.3 KBDownload Recalibration tool SFC5xxx/SFM5xxx
SFC5xxx DeviceNet communication interface reference
  • 03/2023•
  • PDF•
  • 796.4 KB
GuideDownload SFC5xxx DeviceNet communication interface reference03/2023Download SFC5xxx DeviceNet communication interface referencePDFDownload SFC5xxx DeviceNet communication interface reference796.4 KBDownload SFC5xxx DeviceNet communication interface reference
Software manual SFC5xxx/SFM5xxx
  • PDF•
  • 1.3 MB
GuideDownload Software manual SFC5xxx/SFM5xxxDownload Software manual SFC5xxx/SFM5xxxPDFDownload Software manual SFC5xxx/SFM5xxx1.3 MBDownload Software manual SFC5xxx/SFM5xxx
Python driver SFC5xxx/SFM5xxx
  • Link•
SoftwareDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxxLinkDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxx
Recalibration tool software SFC5xxx/SFM5xxx
  • 06/2022•
  • File•
SoftwareDownload Recalibration tool software SFC5xxx/SFM5xxx06/2022Download Recalibration tool software SFC5xxx/SFM5xxxFileDownload Recalibration tool software SFC5xxx/SFM5xxxDownload Recalibration tool software SFC5xxx/SFM5xxx
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
  • 03/2022•
  • ZIP•
  • 1.7 MB
SoftwareDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx03/2022Download Software library LabVIEW, C, C# SFC5xxx/SFM5xxxZIPDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx1.7 MBDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software SFC5xxx/SFM5xxx
  • 04/2022•
  • ZIP•
  • 1.1 MB
SoftwareDownload Software SFC5xxx/SFM5xxx04/2022Download Software SFC5xxx/SFM5xxxZIPDownload Software SFC5xxx/SFM5xxx1.1 MBDownload Software SFC5xxx/SFM5xxx
REACH and RoHS declaration SFC
  • 04/2026•
  • PDF•
  • 99.9 KB
CertificateDownload REACH and RoHS declaration SFC04/2026Download REACH and RoHS declaration SFCPDFDownload REACH and RoHS declaration SFC99.9 KBDownload REACH and RoHS declaration SFC
  • All products
  • •Mass flow controllers
  • •SFC5500

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kitEK-F5xMass flow controllers

EK-F5x

Evaluation kit

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

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Applications for this product

DNA sequencing

Enhanced instrument reliability through precise flow control and machine diagnostics

Learn more
105 x 38.5 x 90.5
mm

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