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Input

Mass flow controllers
Clear all

16 Results

SFC6000-OEM

SFC6000-OEM

MFC with best price-performance ratio, customizable version

Full scale flow rate

2, 5, 20 and 50 slm

0.2% FS or 2% SP

Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses flow

Maximum operating pressure

Fluidic connector ports

Push-in 6mm, downmount

Analog voltage, I²C, RS485

102 x 45 x 20 mm

Sensor
Mass flow controllers

SFC6000D-5slm

SFC6000D-5slm

Best price-performance ratio, distribution version, 5 slm

Full scale flow rate

0.2% FS or 2% SP

Air, N₂, O₂, N₂O, Ar and CO₂ flow

Maximum operating pressure

Fluidic connector ports

Push-in 6mm, downmount

102 x 45 x 20 mm

Sensor
Mass flow controllers

SFC6000D-50slm

SFC6000D-50slm

Best price-performance ratio, distribution version, 50 slm

Full scale flow rate

0.2% FS or 2% SP

Air, N₂, O₂, N₂O and Ar and CO₂ flow

Maximum operating pressure

Fluidic connector ports

Push-in 6mm, downmount

102 x 45 x 20 mm

Sensor
Mass flow controllers

SFC6000D-20slm

SFC6000D-20slm

Best price-performance ratio, distribution version, 20 slm

Full scale flow rate

0.2% FS or 2% SP

Air, N₂, O₂, N₂O, Ar and CO₂ flow

Maximum operating pressure

Fluidic connector ports

Push-in 6mm, downmount

102 x 45 x 20 mm

Sensor
Mass flow controllers

SFC5500-50sccm

SFC5500-50sccm

Versatile mass flow controller, via online distribution, 50sccm

Full scale flow rate

0.2%FS or 2% SP

Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow

Maximum operating pressure

Fluidic connector ports

Device net, RS485

105 x 38.5 x 90.5 mm

Sensor
Mass flow controllers

SFC5500-2slm

SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

Full scale flow rate

0.08% FS or 0.8% SP

Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow

Maximum operating pressure

Fluidic connector ports

Device net, RS485

105 x 38.5 x 90.5 mm

Sensor
Mass flow controllers

SFC5500-200slm

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

Full scale flow rate

0.08% FS or 0.8% SP

Air, O2 and N2 flow

Maximum operating pressure

Fluidic connector ports

Device net, RS485

135 x 24.6 x 91 mm

Sensor
Mass flow controllers

SFC5500-10slm

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

Full scale flow rate

0.08% FS or 0.8% SP

Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow

Maximum operating pressure

Fluidic connector ports

Device net, RS485

115 x 24.6 x 91 mm

Sensor
Mass flow controllers

SFC5500-0.5slm

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

Full scale flow rate

0.08% FS or 0.8% SP

Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow

Maximum operating pressure

Fluidic connector ports

Device net, RS485

115 x 24.6 x 91 mm

Sensor
Mass flow controllers

SFC5460

SFC5460

Versatile MFC for OEM projects with high unit quantities

Full scale flow rate

0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm slm

0.08% FS or 0.8% SP

Air, H2, O2, He, Ar, CO2 and N2 and O2 flow flow

Maximum operating pressure

Fluidic connector ports

Swagelok, VCR, VCO, W-Seal, Downmount

101.1 x 24.4 x 91 mm

Sensor
Mass flow controllers

SFC5400

SFC5400

Versatile mass flow controller

Full scale flow rate

1, 2, 5, 10, 20, 50 and 100 slm

0.08% FS or 0.8% SP

Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow

Maximum operating pressure

Fluidic connector ports

Swagelock, VCO, VCR, Downmount

Analog voltage, Analog current, Device net, IO link, RS485

101.1 x 24.4 x 91 mm

Sensor
Mass flow controllers

SFC5330

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

Full scale flow rate

0.2%FS or 2% SP

Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow

Maximum operating pressure

Fluidic connector ports

34 x 25 x 62.2 mm

Sensor
Mass flow controllers

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