SFC6000

Upcoming

Best price-performance ratio

Specification

Mass flow
Full scale flow rate
0.5, 1, 2, 5, 10, 20 and 50
slm
Full scale flow rate
500, 1000, 2000, 5000, 10000, 20000 and 50000
sccm
Accuracy
2% set point or 0.2% full scale
Maximum operating pressure
10
bar
Calibration
Air, N₂, O₂, CO₂ and Ar and other non-aggressive gasses
flow
Generic
Supply voltage
22.9 - 25.9
V
Interfaces
Analog voltage, I²C, RS485

Technical downloads

Name
Type
Date
File
Size
Mass Flow Controllers brochure
Flyer
11/2022
PDF
582.5 KB
Selection guide mass flow controllers
Application note
07/2022
PDF
255.6 KB
REACH and RoHS declaration SFC
Certificate
07/2022
PDF
95.0 KB

Latest mass flow controllers

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Sensirion’s sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.