SFC5500

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SFC5500-50sccm

SFC5500-50sccm

Versatile mass flow controller, via online distribution, 50sccm

Full scale flow rate
0.05 slm
Accuracy
0.2%FS or 2% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
10 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Mass flow controllers
SFC5500-2slm

SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

Full scale flow rate
2 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
8 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Mass flow controllers
SFC5500-200slm

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

Full scale flow rate
200 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2 and N2 flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
135 x 24.6 x 91 mm
  • Sensor
  • Mass flow controllers
SFC5500-10slm

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

Full scale flow rate
10 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
115 x 24.6 x 91 mm
  • Sensor
  • Mass flow controllers
SFC5500-0.5slm

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

Full scale flow rate
0.5 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
115 x 24.6 x 91 mm
  • Sensor
  • Mass flow controllers