SFC5400Back to catalogFiltersProduct categoryMass flow controllers2Humidity sensors0Temperature sensors0NOx & VOC sensors0Formaldehyde sensors0CO₂ sensors0Particulate matter sensors0Liquid flow sensors0Differential pressure sensors0Gas flow sensors0Gas metering solutions0Refrigerants sensors0ClassSensor2Accessory0Development board0Evaluation kit0Reference design0Product statusActive2Upcoming0New0Not recommended for new designs0Last time buy0Obsolete0InterfaceRS4852Device net1IO link1Analog voltage1Analog current1I²C0Sensibus0PWM0SDM0UART0RS2320Switch0ModBus0Compare SFC5460Versatile MFC for OEM projects with high unit quantitiesFull scale flow rate0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm slmAccuracy0.08% FS or 0.8% SPCalibrationAir, H2, O2, He, Ar, CO2 and N2 and O2 flow flowMaximum operating pressure5 barFluidic connector portsSwagelok, VCR, VCO, W-Seal, DownmountInterfacesRS485Supply voltage14 - 26 VSize (LxWxH)101.1 x 24.4 x 91 mmSensorMass flow controllersCompare SFC5400Versatile mass flow controllerFull scale flow rate1, 2, 5, 10, 20, 50 and 100 slmAccuracy0.08% FS or 0.8% SPCalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flowMaximum operating pressure5 barFluidic connector portsSwagelock, VCO, VCR, DownmountInterfacesAnalog voltage, Analog current, Device net, IO link, RS485Supply voltage14 - 26.4 VSize (LxWxH)101.1 x 24.4 x 91 mmSensorMass flow controllers
