Back to catalogSFC5400FiltersProduct categoryMass flow controllers2Humidity sensors0Temperature sensors0Refrigerant leakage sensors0CO₂ sensors0O₂ sensors0NOx & VOC sensors0Formaldehyde sensors0Particulate matter sensors0Hydrogen sensors0Liquid flow sensors0Gas flow sensors0Differential pressure sensors0Gas metering solutions0ClassSensor2Accessory0Development board0Evaluation kit0Reference design0Product statusActive2Upcoming0New0Not recommended for new designs0Last time buy0End of life0InterfaceRS4852Device net1IO link1Analog voltage1Analog current1I²C0Sensibus0PWM0SDM0UART0RS2320Switch0ModBus0Show archived productsSimplify product viewCompare SFC5460Versatile MFC for OEM projects with high unit quantitiesSensorMass flow controllersCompare SFC5400Versatile mass flow controllerSensorMass flow controllers