3 Products

2 Downloads

Name Series Date Type Size
STEP file SFC5400
10.2021 ZIP 3.2 MB
Mass flow controllers / SFC5400 / SFM5400
10.2021
ZIP 3.2 MB
Datasheet SFC5400/SFM5400
05.2023 PDF 798.8 KB
Gas flow sensors / Mass flow controllers / SFC5400 / SFM5400
05.2023
PDF 798.8 KB