SFM5400
High-precision, configurable, fast, multi-gas flow sensor
The SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made of metal and highly configurable. It is available with a variety of fluidic connections and various interfaces and measures maximum flow rates between 50 sccm and 100 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow meter can check whether the activated gas calibration matches the actual gas present. The SFM5400's versatility makes it the ideal solution for industrial and medical applications. The outstanding performance of the SFM5400 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow meter. The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. The SFC5400 mass flow controller has the same performance characteristics as the mass flow meter and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5400 website.
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
| 0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100 | slm | |
| Accuracy
0.08% FS or 0.8% SP
| 0.08% FS or 0.8% SP | ||
| Maximum operating pressure
10
| 10 | bar | |
| Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
| Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| Fluidic connector ports
Swagelock, VCO, VCR, Downmount
| Swagelock, VCO, VCR, Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage
14 - 26.4
| 14 - 26.4 | V | |
| Average supply current
50000
| 50000 | uA | |
| Max. supply current
320000
| 320000 | uA | |
| Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
| Analog voltage,Analog current,Device net,IO link,RS485 | ||
| Size (LxWxH)
101.1 x 24.4 x 91
| 101.1 x 24.4 x 91 | mm³ |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
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