SFM5400

High-precision, configurable, fast, multi-gas flow sensor

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Specification

Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100 slm
Accuracy
0.08% FS or 0.8% SP
0.08% FS or 0.8% SP
Maximum operating pressure
10
10 bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
14 - 26.4 V
Average supply current
50000
50000 uA
Max. supply current
320000
320000 uA
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Analog voltage,Analog current,Device net,IO link,RS485
Size (LxWxH)
101.1 x 24.4 x 91
101.1 x 24.4 x 91 mm³

Downloads

Name Type Date File Size
Datasheet SFC5400/SFM5400

05/2023

File

798.8 KB

Datasheet 05/2023 PDF 798.8 KB
Mounting Plate SFX54xx

07/2022

File

168.2 KB

Drawings/CAD 07/2022 STEP 168.2 KB
STEP file SFC5400

10/2021

File

3.2 MB

Drawings/CAD 10/2021 ZIP 3.2 MB
STEP file SFM5400

07/2022

File

3.7 MB

Drawings/CAD 07/2022 ZIP 3.7 MB
Engineering guide SFC5xxx/SFM5xxx

07/2023

File

869.9 KB

Application note 07/2023 PDF 869.9 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note 09/2021 PDF 293.7 KB
Reference and flow conversions calculator

10/2021

File

30.3 KB

Application note 10/2021 XLSX 30.3 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx

02/2022

File

665.2 KB

Application note 02/2022 PDF 665.2 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

Guide 09/2021 PDF 369.3 KB
Recalibration tool SFC5xxx/SFM5xxx

07/2022

File

1002.3 KB

Guide 07/2022 PDF 1002.3 KB
SFC5xxx DeviceNet communication interface reference

03/2023

File

796.4 KB

Guide 03/2023 PDF 796.4 KB
Software manual SFC5xxx/SFM5xxx

03/2022

File

1.3 MB

Guide 03/2022 PDF 1.3 MB
Python driver SFC5xxx/SFM5xxx

03/2022

Link

-

Software 03/2022 Link -
Recalibration tool software SFC5xxx/SFM5xxx

06/2022

File

-

Software 06/2022 File -
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software 03/2022 ZIP 1.7 MB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Software 04/2022 ZIP 1.1 MB
REACH and RoHS declaration SFM/SGM

11/2024

File

97.9 KB

Certificate 11/2024 PDF 97.9 KB
Gas flow sensors brochure

01/2024

File

622.9 KB

Flyer 01/2024 PDF 622.9 KB
Mass flow controllers brochure chinese

06/2024

File

633.9 KB

Flyer 06/2024 PDF 633.9 KB

Sensor evaluation

Buy the following products to evaluate this sensor

Name Description Series Category
EK-F5x
Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... EK-F5x Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

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Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.