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SFM5400

High-precision, configurable, fast, multi-gas flow sensor

The SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made of metal and highly configurable. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow meter can check whether the activated gas calibration matches the actual gas present. The SFM5400's versatility makes it the ideal solution for industrial and medical applications. The outstanding performance of the SFM5400 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow meter. The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. The SFC5400 mass flow controller has the same performance characteristics as the mass flow meter and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5400 website.

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Specification

Gas flow
Typical accuracy0.08% FS or 0.8% SP0.08% FS or 0.8% SP
CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
Maximum operating pressure10bar10bar
Fluidic connector portsSwagelock, VCO, VCR, DownmountSwagelock, VCO, VCR, Downmount
Mass flow
Full scale flow rate0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100slm0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100slm
Accuracy0.08% FS or 0.8% SP0.08% FS or 0.8% SP
Maximum operating pressure10bar10bar
CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flowAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flow
Fluidic connector portsSwagelock, VCO, VCR, Downmount
Generic
Supply voltage14 - 26.4V14 - 26.4V
Average supply current50000uA50000uA
Max. supply current320000uA320000uA
InterfacesAnalog voltage, Analog current, Device net, IO link, RS485Analog voltage, Analog current, Device net, IO link, RS485
Size (LxWxH)101.1 x 24.4 x 91mm

Downloads

Datasheet SFC5400/SFM5400
  • 05/2023•
  • PDF•
  • 798.8 KB
DatasheetDownload Datasheet SFC5400/SFM540005/2023Download Datasheet SFC5400/SFM5400PDFDownload Datasheet SFC5400/SFM5400798.8 KBDownload Datasheet SFC5400/SFM5400
Mounting Plate SFX54xx
  • 07/2022•
  • STEP•
  • 168.2 KB
Drawings/CADDownload Mounting Plate SFX54xx07/2022Download Mounting Plate SFX54xxSTEPDownload Mounting Plate SFX54xx168.2 KBDownload Mounting Plate SFX54xx
STEP file SFC5400
  • ZIP•
  • 3.2 MB
Drawings/CADDownload STEP file SFC5400Download STEP file SFC5400ZIPDownload STEP file SFC54003.2 MBDownload STEP file SFC5400
STEP file SFM5400
  • 07/2022•
  • ZIP•
  • 3.7 MB
Drawings/CADDownload STEP file SFM540007/2022Download STEP file SFM5400ZIPDownload STEP file SFM54003.7 MBDownload STEP file SFM5400
Engineering guide SFC5xxx/SFM5xxx
  • 07/2023•
  • PDF•
  • 869.9 KB
Application noteDownload Engineering guide SFC5xxx/SFM5xxx07/2023Download Engineering guide SFC5xxx/SFM5xxxPDFDownload Engineering guide SFC5xxx/SFM5xxx869.9 KBDownload Engineering guide SFC5xxx/SFM5xxx
Reference and flow conversions
  • 09/2021•
  • PDF•
  • 293.7 KB
Application noteDownload Reference and flow conversions09/2021Download Reference and flow conversionsPDFDownload Reference and flow conversions293.7 KBDownload Reference and flow conversions
Reference and flow conversions calculator
  • XLSX•
  • 30.3 KB
Application noteDownload Reference and flow conversions calculatorDownload Reference and flow conversions calculatorXLSXDownload Reference and flow conversions calculator30.3 KBDownload Reference and flow conversions calculator
SHDLC Interface Reference SFM5xxx/SFC5xxx
  • PDF•
  • 665.2 KB
Application noteDownload SHDLC Interface Reference SFM5xxx/SFC5xxxDownload SHDLC Interface Reference SFM5xxx/SFC5xxxPDFDownload SHDLC Interface Reference SFM5xxx/SFC5xxx665.2 KBDownload SHDLC Interface Reference SFM5xxx/SFC5xxx
Quick start guide SFC5xxx/SFM5xxx
  • 09/2021•
  • PDF•
  • 369.3 KB
GuideDownload Quick start guide SFC5xxx/SFM5xxx09/2021Download Quick start guide SFC5xxx/SFM5xxxPDFDownload Quick start guide SFC5xxx/SFM5xxx369.3 KBDownload Quick start guide SFC5xxx/SFM5xxx
Recalibration tool SFC5xxx/SFM5xxx
  • 07/2022•
  • PDF•
  • 1002.3 KB
GuideDownload Recalibration tool SFC5xxx/SFM5xxx07/2022Download Recalibration tool SFC5xxx/SFM5xxxPDFDownload Recalibration tool SFC5xxx/SFM5xxx1002.3 KBDownload Recalibration tool SFC5xxx/SFM5xxx
SFC5xxx DeviceNet communication interface reference
  • 03/2023•
  • PDF•
  • 796.4 KB
GuideDownload SFC5xxx DeviceNet communication interface reference03/2023Download SFC5xxx DeviceNet communication interface referencePDFDownload SFC5xxx DeviceNet communication interface reference796.4 KBDownload SFC5xxx DeviceNet communication interface reference
Software manual SFC5xxx/SFM5xxx
  • PDF•
  • 1.3 MB
GuideDownload Software manual SFC5xxx/SFM5xxxDownload Software manual SFC5xxx/SFM5xxxPDFDownload Software manual SFC5xxx/SFM5xxx1.3 MBDownload Software manual SFC5xxx/SFM5xxx
Python driver SFC5xxx/SFM5xxx
  • Link•
SoftwareDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxxLinkDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxx
Recalibration tool software SFC5xxx/SFM5xxx
  • 06/2022•
  • File•
SoftwareDownload Recalibration tool software SFC5xxx/SFM5xxx06/2022Download Recalibration tool software SFC5xxx/SFM5xxxFileDownload Recalibration tool software SFC5xxx/SFM5xxxDownload Recalibration tool software SFC5xxx/SFM5xxx
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
  • 03/2022•
  • ZIP•
  • 1.7 MB
SoftwareDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx03/2022Download Software library LabVIEW, C, C# SFC5xxx/SFM5xxxZIPDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx1.7 MBDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software SFC5xxx/SFM5xxx
  • 04/2022•
  • ZIP•
  • 1.1 MB
SoftwareDownload Software SFC5xxx/SFM5xxx04/2022Download Software SFC5xxx/SFM5xxxZIPDownload Software SFC5xxx/SFM5xxx1.1 MBDownload Software SFC5xxx/SFM5xxx
REACH and RoHS declaration SFM/SGM
  • 04/2026•
  • PDF•
  • 104.6 KB
CertificateDownload REACH and RoHS declaration SFM/SGM04/2026Download REACH and RoHS declaration SFM/SGMPDFDownload REACH and RoHS declaration SFM/SGM104.6 KBDownload REACH and RoHS declaration SFM/SGM
Gas flow sensors brochure
  • 10/2025•
  • PDF•
  • 497.6 KB
FlyerDownload Gas flow sensors brochure10/2025Download Gas flow sensors brochurePDFDownload Gas flow sensors brochure497.6 KBDownload Gas flow sensors brochure
  • All products
  • •Gas flow sensors
  • •SFM5xxx

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kitEK-F5xMass flow controllers

EK-F5x

Evaluation kit

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

Applications for this product

Air conditioners

Highest comfort and maximum energy efficiency enabled by advanced sensors for air conditioner

Learn more

Air purifiers

Air quality monitoring with our air purifier sensor

Learn more

IAQ Monitors

Make indoor environments safer, healthier, and more comfortable with advanced sensor monitoring

Learn more

CO₂ monitoring for better sleep quality

Understanding how ventilation impacts sleep, health, and recovery

Learn more

Combustion control

Sensor solution enabling precise, reliable combustion control

Learn more

Demand-controlled ventilators

Maximized well-being and optimum energy efficiency with our DCV sensor

Learn more

DNA sequencing

Enhanced instrument reliability through precise flow control and machine diagnostics

Learn more

Filter monitoring

Optimal strategy for replacing filters

Learn more

Gas meters

Gas meter module built for accuracy, durability, and future energy transitions

Learn more

Microfluidics

Enhanced instrument performance through precise microliter-flow control using our microfluidic flow sensor

Learn more

Transport of perishable goods

Sensors play a vital role in maintaining quality during the transport of perishable goods

Learn more

Transport of pharmaceutical goods

Sensors for pharmaceutical logistics that ensure safe, temperature-controlled transport

Learn more

Photoresist and dosing

Precise dosing when applying photoresist

Learn more

Refrigerator sensors

Advanced refrigerator sensor solutions for precise condensation control

Learn more

Room sensors

Precise visualization and characterization of indoor air

Learn more

Smart speakers

Air quality sensors turn smart speakers into intelligent indoor air monitors

Learn more

Thermostats

Why thermostats depend on accurate sensors

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VAV controllers

Drive and control solutions for airflow control

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Flow cytometry

Real-time direct flow measurements to count and sort cells

Learn more

Smart inhaler flow sensor

Smart Inhaler supporting asthma and COPD patients during inhalation

Learn more

Subcutaneous drug delivery

Miniaturized flow sensor in large‑volume injectors track drug delivery

Learn more

Mechanical ventilators

Precise and safe patient ventilation using ventilator flow sensors

Learn more

Anesthesia flow sensor

Unlock precise gas mixing at minimal flows with ultra-accurate anesthesia low flow sensors

Learn more
Swagelock, VCO, VCR, Downmount
101.1 x 24.4 x 91
mm

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