Mass flow | |||
---|---|---|---|
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
| 0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100 | slm | |
Accuracy
0.08% FS or 0.8% SP
| 0.08% FS or 0.8% SP | ||
Maximum operating pressure
10
| 10 | bar | |
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
| Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
| Swagelock, VCO, VCR, Downmount |
Generic | |||
---|---|---|---|
Supply voltage
14 - 26.4
| 14 - 26.4 | V | |
Average supply current
50000
| 50000 | uA | |
Max. supply current
320000
| 320000 | uA | |
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
| Analog voltage,Analog current,Device net,IO link,RS485 | ||
Size (LxWxH)
101.1 x 24.4 x 91
| 101.1 x 24.4 x 91 | mm³ |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.