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Datasheet SFC5400/SFM5400 05.2023• PDF • 798.8 KB	Gas flow sensors / Mass flow controllers / SFC5400 / SFM5400	05.2023	PDF	798.8 KB
STEP file SFC5400 ZIP • 3.2 MB	Mass flow controllers / SFC5400 / SFM5400		ZIP	3.2 MB