Predecessor of the SFC5400 mass flow controller
| Name | Description | Series | Category |
|---|---|---|---|
SFC5400 | Versatile mass flow controller | SFC5400 | Mass flow controllers |
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 1, 2, 5 and 10 | 1, 2, 5 and 10 | slm | |
| Accuracy 0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| Maximum operating pressure 10 | 10 | bar | |
| Calibration Air, O2, N2, Ar and CO2 | Air, O2, N2, Ar and CO2 | flow | |
| Fluidic connector ports Swagelock, VCO, VCR, Downmount | Swagelock, VCO, VCR, Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
| Average supply current 50000 | 50000 | uA | |
| Max. supply current 320000 | 320000 | uA | |
| Interfaces Analog voltage | Analog voltage | ||
| Size (LxWxH) 105 x 38.5 x 90.5 | 105 x 38.5 x 90.5 | mm |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.