SFC4000
ObsoletePredecessor of the SFC5400 mass flow controller
Sensirion's mass flow controller SFC4000 offers fast response times and accurate control of gas flows over a wide range.
Based on the CMOSens® Technology the digital calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the analog controlling circuit to control the valve. Thanks to this principle the mass flow controller is insusceptible to electromagnetic interferences. The SFC4000 offers an analog interface (0 - 5 V) and provides stable and precise control of gas flows. Required power supply is unipolar 14 to 24 VDC.
Successor product
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 1, 2, 5 and 10 | 1, 2, 5 and 10 | slm | |
| Accuracy 0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| Maximum operating pressure 10 | 10 | bar | |
| Calibration Air, O2, N2, Ar and CO2 | Air, O2, N2, Ar and CO2 | flow | |
| Fluidic connector ports Swagelock, VCO, VCR, Downmount | Swagelock, VCO, VCR, Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
| Average supply current 50000 | 50000 | uA | |
| Max. supply current 320000 | 320000 | uA | |
| Interfaces Analog voltage | Analog voltage | ||
| Size (LxWxH) 105 x 38.5 x 90.5 | 105 x 38.5 x 90.5 | mm |
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