Predecessor of the SFC5400 mass flow controller
| Name | Description | Series | Category |
|---|---|---|---|
SFC5400 | Versatile mass flow controller | SFC5400 | Mass flow controllers |
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate1, 2, 5 and 10slm | 1, 2, 5 and 10 | slm | |
| Accuracy0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| Maximum operating pressure10bar | 10 | bar | |
| CalibrationAir, O2, N2, Ar and CO2flow | Air, O2, N2, Ar and CO2 | flow | |
| Fluidic connector portsSwagelock, VCO, VCR, Downmount | Swagelock, VCO, VCR, Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage14 - 26.4V | 14 - 26.4 | V | |
| Average supply current50000uA | 50000 | uA | |
| Max. supply current320000uA | 320000 | uA | |
| InterfacesAnalog voltage | Analog voltage | ||
| Size (LxWxH)105 x 38.5 x 90.5mm |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.
| mm |