SFM5xxx

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SFM5500-50sccm

SFM5500-50sccm

High-pressure mass flow meter for multiple gases, 50 sccm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Gas flow sensors
SFM5500-2slm

SFM5500-2slm

High-pressure mass flow meter for multiple gases, 2 slm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Gas flow sensors
SFM5500-10slm

SFM5500-10slm

High-pressure mass flow meter for multiple gases, 10 slm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Gas flow sensors
SFM5500-0.5slm

SFM5500-0.5slm

High-pressure mass flow meter for multiple gases, 0.5 slm

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm
  • Sensor
  • Gas flow sensors
SFM5460

SFM5460

High-precision, configurable, fast, gas flow sensor for OEM

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
RS485
Supply voltage
14 - 26 V
Size (LxWxH)
101.1 x 24.4 x 91 mm
  • Sensor
  • Gas flow sensors
SFM5400

SFM5400

High-precision, configurable, fast, multi-gas flow sensor

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
101.1 x 24.4 x 91 mm
  • Sensor
  • Gas flow sensors
SFM5330

SFM5330

High-precision, configurable, fast, digital flow sensor for OEM

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
34 x 25 x 62.2 mm
  • Sensor
  • Gas flow sensors
SFM5300

SFM5300

High-precision, configurable, fast, digital flow sensor for OEM

Full scale flow rate
-
Typical accuracy
-
Calibration
-
Maximum operating pressure
-
Fluidic connector ports
-
Interfaces
RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
48 x 25 x 79.5 mm
  • Sensor
  • Gas flow sensors