Back to catalogSFM5xxxFiltersProduct categoryGas flow sensors8Humidity sensors0Temperature sensors0NOx & VOC sensors0Formaldehyde sensors0CO₂ sensors0Particulate matter sensors0Liquid flow sensors0Differential pressure sensors0Mass flow controllers0Gas metering solutions0Refrigerants sensors0O₂ sensors0ClassSensor8Accessory0Development board0Evaluation kit0Reference design0Product statusActive8Upcoming0New0Not recommended for new designs0Last time buy0End of life0InterfaceRS4858Device net5IO link1Analog voltage1Analog current1I²C0Sensibus0PWM0SDM0UART0RS2320Switch0ModBus0Show archived productsSimplify product viewCompare SFM5500-50sccmHigh-pressure mass flow meter for multiple gases, 50 sccmSensorGas flow sensorsCompare SFM5500-2slmHigh-pressure mass flow meter for multiple gases, 2 slmSensorGas flow sensorsCompare SFM5500-10slmHigh-pressure mass flow meter for multiple gases, 10 slmSensorGas flow sensorsCompare SFM5500-0.5slmHigh-pressure mass flow meter for multiple gases, 0.5 slmSensorGas flow sensorsCompare SFM5460High-precision, configurable, fast, gas flow sensor for OEMSensorGas flow sensorsCompare SFM5400High-precision, configurable, fast, multi-gas flow sensorSensorGas flow sensorsCompare SFM5330High-precision, configurable, fast, digital flow sensor for OEMSensorGas flow sensorsCompare SFM5300High-precision, configurable, fast, digital flow sensor for OEMSensorGas flow sensors