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SFM5500-50sccm

High-pressure mass flow meter for multiple gases, 50 sccm

SFM5500 mass flow meter series represent the culmination of Sensirion’s excellent 20-year track record in measuring gas flow. The device is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow meter with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration. Thanks to the exceptionally high measurement range enabled by the CMOSens® MEMS flow sensor, SFM5500 series can cover multiple flow ranges of a traditional mass flow meter in a single device. They are available in metal packaging, which additionally allows for high pressure resistance. Finally, unlike most devices on the market, SFM5500 are suitable for low and ultra-low (down to 50 sccm full scale flow), as well as high gas flows. Coupled with multi-gas calibration and exchangeable fittings, SFM5500 series are the first of a kind mass flow meters on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFM5500 series are also the first mass flow meters in its category available via catalogue distribution. SFM5500 series complements the SFM5xxx family of Sensirion’s best-in-class mass flow meters, offering the same top performance as SFM5400 and is thus suited for a broad range of applications where best accuracy, highest speed and widest dynamic range are needed. However, unlike the highly configurable SFM5400 series, SFM5500 series mass flow meters are available in several standard pre-configured variants. For other gases, flow ranges, fittings and interfaces please check SFM5400, or Sensirion’s most cost-efficient solution for large OEM projects – SFM5300. If you are looking for a mass flow controller, SFC5500 is a sister variant of SFM5500 featuring a valve. It offers the same great performance.

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Specification

Gas flow
Typical accuracy0.2%FS or 2% SP0.2%FS or 2% SP
CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4 and N2OAir, O2, N2, Ar, CO2, He, H2, CH4 and N2O
Maximum operating pressure10bar10bar
Fluidic connector portsLegrisLegris
Mass flow
Full scale flow rate0.05slm0.05slm
Full scale flow rate50sccm50sccm
Accuracy0.2%FS or 2% SP0.2%FS or 2% SP
Maximum operating pressure10bar10bar
CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4 and N2OflowAir, O2, N2, Ar, CO2, He, H2, CH4 and N2Oflow
Fluidic connector portsLegrisLegris
Generic
Supply voltage14 - 26.4V14 - 26.4V
Average supply current35000uA35000uA
Max. supply current50000uA50000uA
InterfacesDevice net, RS485Device net, RS485
Size (LxWxH)105 x 38.5 x 90.5mm

Downloads

Datasheet SFC5500/SFM5500
  • 02/2024•
  • PDF•
  • 975.3 KB
DatasheetDownload Datasheet SFC5500/SFM550002/2024Download Datasheet SFC5500/SFM5500PDFDownload Datasheet SFC5500/SFM5500975.3 KBDownload Datasheet SFC5500/SFM5500
Compatible fittings SFC5500/SFM5500
  • 10/2022•
  • PDF•
  • 193.4 KB
Application noteDownload Compatible fittings SFC5500/SFM550010/2022Download Compatible fittings SFC5500/SFM5500PDFDownload Compatible fittings SFC5500/SFM5500193.4 KBDownload Compatible fittings SFC5500/SFM5500
STEP file SFM5500-50sccm/0.5slm/2slm/10slm
  • 10/2022•
  • STEP•
  • 3.4 MB
Drawings/CADDownload STEP file SFM5500-50sccm/0.5slm/2slm/10slm10/2022Download STEP file SFM5500-50sccm/0.5slm/2slm/10slmSTEPDownload STEP file SFM5500-50sccm/0.5slm/2slm/10slm3.4 MBDownload STEP file SFM5500-50sccm/0.5slm/2slm/10slm
Engineering guide SFC5xxx/SFM5xxx
  • 07/2023•
  • PDF•
  • 869.9 KB
Application noteDownload Engineering guide SFC5xxx/SFM5xxx07/2023Download Engineering guide SFC5xxx/SFM5xxxPDFDownload Engineering guide SFC5xxx/SFM5xxx869.9 KBDownload Engineering guide SFC5xxx/SFM5xxx
Reference and flow conversions
  • 09/2021•
  • PDF•
  • 293.7 KB
Application noteDownload Reference and flow conversions09/2021Download Reference and flow conversionsPDFDownload Reference and flow conversions293.7 KBDownload Reference and flow conversions
Reference and flow conversions calculator
  • XLSX•
  • 30.3 KB
Application noteDownload Reference and flow conversions calculatorDownload Reference and flow conversions calculatorXLSXDownload Reference and flow conversions calculator30.3 KBDownload Reference and flow conversions calculator
SHDLC Interface Reference SFM5xxx/SFC5xxx
  • PDF•
  • 665.2 KB
Application noteDownload SHDLC Interface Reference SFM5xxx/SFC5xxxDownload SHDLC Interface Reference SFM5xxx/SFC5xxxPDFDownload SHDLC Interface Reference SFM5xxx/SFC5xxx665.2 KBDownload SHDLC Interface Reference SFM5xxx/SFC5xxx
Quick start guide SFC5xxx/SFM5xxx
  • 09/2021•
  • PDF•
  • 369.3 KB
GuideDownload Quick start guide SFC5xxx/SFM5xxx09/2021Download Quick start guide SFC5xxx/SFM5xxxPDFDownload Quick start guide SFC5xxx/SFM5xxx369.3 KBDownload Quick start guide SFC5xxx/SFM5xxx
Recalibration tool SFC5xxx/SFM5xxx
  • 07/2022•
  • PDF•
  • 1002.3 KB
GuideDownload Recalibration tool SFC5xxx/SFM5xxx07/2022Download Recalibration tool SFC5xxx/SFM5xxxPDFDownload Recalibration tool SFC5xxx/SFM5xxx1002.3 KBDownload Recalibration tool SFC5xxx/SFM5xxx
SFC5xxx DeviceNet communication interface reference
  • 03/2023•
  • PDF•
  • 796.4 KB
GuideDownload SFC5xxx DeviceNet communication interface reference03/2023Download SFC5xxx DeviceNet communication interface referencePDFDownload SFC5xxx DeviceNet communication interface reference796.4 KBDownload SFC5xxx DeviceNet communication interface reference
Software manual SFC5xxx/SFM5xxx
  • PDF•
  • 1.3 MB
GuideDownload Software manual SFC5xxx/SFM5xxxDownload Software manual SFC5xxx/SFM5xxxPDFDownload Software manual SFC5xxx/SFM5xxx1.3 MBDownload Software manual SFC5xxx/SFM5xxx
Python driver SFC5xxx/SFM5xxx
  • Link•
SoftwareDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxxLinkDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxx
Recalibration tool software SFC5xxx/SFM5xxx
  • 06/2022•
  • File•
SoftwareDownload Recalibration tool software SFC5xxx/SFM5xxx06/2022Download Recalibration tool software SFC5xxx/SFM5xxxFileDownload Recalibration tool software SFC5xxx/SFM5xxxDownload Recalibration tool software SFC5xxx/SFM5xxx
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
  • 03/2022•
  • ZIP•
  • 1.7 MB
SoftwareDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx03/2022Download Software library LabVIEW, C, C# SFC5xxx/SFM5xxxZIPDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx1.7 MBDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software SFC5xxx/SFM5xxx
  • 04/2022•
  • ZIP•
  • 1.1 MB
SoftwareDownload Software SFC5xxx/SFM5xxx04/2022Download Software SFC5xxx/SFM5xxxZIPDownload Software SFC5xxx/SFM5xxx1.1 MBDownload Software SFC5xxx/SFM5xxx
REACH and RoHS declaration SFM/SGM
  • 04/2026•
  • PDF•
  • 104.6 KB
CertificateDownload REACH and RoHS declaration SFM/SGM04/2026Download REACH and RoHS declaration SFM/SGMPDFDownload REACH and RoHS declaration SFM/SGM104.6 KBDownload REACH and RoHS declaration SFM/SGM
Gas flow sensors brochure
  • 10/2025•
  • PDF•
  • 497.6 KB
FlyerDownload Gas flow sensors brochure10/2025Download Gas flow sensors brochurePDFDownload Gas flow sensors brochure497.6 KBDownload Gas flow sensors brochure
  • All products
  • •Gas flow sensors
  • •SFM5xxx

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kitEK-F5xMass flow controllers

EK-F5x

Evaluation kit

EK-F5x

Mass flow controllers

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Applications for this product

DNA sequencing

Enhanced instrument reliability through precise flow control and machine diagnostics

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Unlock precise gas mixing at minimal flows with ultra-accurate anesthesia low flow sensors

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105 x 38.5 x 90.5
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