SFM5460
High-precision, configurable, fast, gas flow sensor for OEM
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm
| 0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm | slm | |
| Full scale flow rate
20 and 50 and 100 sccm
| 20 and 50 and 100 sccm | sccm | |
| Accuracy
0.08% FS or 0.8% SP
| 0.08% FS or 0.8% SP | ||
| Maximum operating pressure
5
| 5 | bar | |
| Calibration
Air, H2, O2, He, Ar, CO2 and N2 and O2 flow
| Air, H2, O2, He, Ar, CO2 and N2 and O2 flow | flow |
| Generic | |||
|---|---|---|---|
| Supply voltage
14 - 26
| 14 - 26 | V | |
| Average supply current
50000
| 50000 | uA | |
| Max. supply current
320000
| 320000 | uA | |
| Interfaces
RS485
| RS485 | ||
| Size (LxWxH)
101.1 x 24.4 x 91
| 101.1 x 24.4 x 91 | mm³ |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Download the respective viewer software to start measuring
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Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.