SFM5330
High-precision, configurable, fast, digital flow sensor for OEM
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 1, 2 and 5 | 1, 2 and 5 | slm | |
| Full scale flow rate 50, 100, 200 and 500 | 50, 100, 200 and 500 | sccm | |
| Accuracy 0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| Maximum operating pressure 10 | 10 | bar | |
| Calibration Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| Fluidic connector ports Downmount | Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
| Average supply current 50000 | 50000 | uA | |
| Max. supply current 320000 | 320000 | uA | |
| Interfaces RS485 | RS485 | ||
| Size (LxWxH) 34 x 25 x 62.2 | 34 x 25 x 62.2 | mm |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Download the respective viewer software to start measuring
Go to download centerStart testing our sensors fast and easy with the evaluation kits
How to get started
Smart sensors for your application
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.
