SFM5330
High-precision, configurable, fast, digital flow sensor for OEM
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 1, 2 and 5 | 1, 2 and 5 | slm | |
| Full scale flow rate 50, 100, 200 and 500 | 50, 100, 200 and 500 | sccm | |
| Accuracy 0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| Maximum operating pressure 10 | 10 | bar | |
| Calibration Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| Fluidic connector ports Downmount | Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
| Average supply current 50000 | 50000 | uA | |
| Max. supply current 320000 | 320000 | uA | |
| Interfaces RS485 | RS485 | ||
| Size (LxWxH) 34 x 25 x 62.2 | 34 x 25 x 62.2 | mm |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
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