SFM5330
High-precision, configurable, fast, digital flow sensor for OEM
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate
1, 2 and 5
| 1, 2 and 5 | slm | |
| Full scale flow rate
50, 100, 200 and 500
| 50, 100, 200 and 500 | sccm | |
| Accuracy
0.2%FS or 2% SP
| 0.2%FS or 2% SP | ||
| Maximum operating pressure
10
| 10 | bar | |
| Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
| Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| Fluidic connector ports
Downmount
| Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage
14 - 26.4
| 14 - 26.4 | V | |
| Average supply current
50000
| 50000 | uA | |
| Max. supply current
320000
| 320000 | uA | |
| Interfaces
RS485
| RS485 | ||
| Size (LxWxH)
34 x 25 x 62.2
| 34 x 25 x 62.2 | mm³ |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Download the respective viewer software to start measuring
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Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.