High-precision, configurable, fast, digital flow sensor for OEM
| Gas flow | |||
|---|---|---|---|
| Typical accuracy0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | ||
| Maximum operating pressure10bar | 10 | bar | |
| Fluidic connector portsDownmount | Downmount |
| Mass flow |
|---|
| Full scale flow rate1, 2 and 5slm | 1, 2 and 5 | slm | |
| Full scale flow rate50, 100, 200 and 500sccm | 50, 100, 200 and 500 | sccm | |
| Accuracy0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| Maximum operating pressure10bar | 10 | bar | |
| CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flow | Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| Fluidic connector portsDownmount | Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage14 - 26.4V | 14 - 26.4 | V | |
| Average supply current50000uA | 50000 | uA | |
| Max. supply current320000uA | 320000 | uA | |
| InterfacesRS485 | RS485 | ||
| Size (LxWxH)34 x 25 x 62.2mm | 34 x 25 x 62.2 | mm |
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit | EK-F5x | Mass flow controllers |
