High-pressure mass flow meter for multiple gases, 2 slm
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 2 | 2 | slm | |
| Full scale flow rate 2000 | 2000 | sccm | |
| Accuracy 0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
| Maximum operating pressure 10 | 10 | bar | |
| Calibration Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O | flow | |
| Fluidic connector ports Legris | Legris |
| Generic | |||
|---|---|---|---|
| Supply voltage 14 - 26.4 | 14 - 26.4 | V | |
| Average supply current 35000 | 35000 | uA | |
| Max. supply current 50000 | 50000 | uA | |
| Interfaces Device net, RS485 | Device net, RS485 | ||
| Size (LxWxH) 105 x 38.5 x 90.5 | 105 x 38.5 x 90.5 | mm |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.