SFM5500-2slm

High-pressure mass flow meter for multiple gases, 2 slm

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Specification

Mass flow
Full scale flow rate
2
2 slm
Full scale flow rate
2000
2000 sccm
Accuracy
0.08% FS or 0.8% SP
0.08% FS or 0.8% SP
Maximum operating pressure
10
10 bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Fluidic connector ports
Legris
Legris
Generic
Supply voltage
14 - 26.4
14 - 26.4 V
Average supply current
35000
35000 uA
Max. supply current
50000
50000 uA
Interfaces
Device net, RS485
Device net,RS485
Size (LxWxH)
105 x 38.5 x 90.5
105 x 38.5 x 90.5 mm³

Downloads

Name Type Date File Size
Datasheet SFC5500/SFM5500

02/2024

File

975.3 KB

Datasheet 02/2024 PDF 975.3 KB
Compatible fittings SFC5500/SFM5500

10/2022

File

193.4 KB

Application note 10/2022 PDF 193.4 KB
STEP file SFM5500-50sccm/0.5slm/2slm/10slm

10/2022

File

3.4 MB

Drawings/CAD 10/2022 STEP 3.4 MB
Engineering guide SFC5xxx/SFM5xxx

07/2023

File

869.9 KB

Application note 07/2023 PDF 869.9 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note 09/2021 PDF 293.7 KB
Reference and flow conversions calculator

10/2021

File

30.3 KB

Application note 10/2021 XLSX 30.3 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx

02/2022

File

665.2 KB

Application note 02/2022 PDF 665.2 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

Guide 09/2021 PDF 369.3 KB
Recalibration tool SFC5xxx/SFM5xxx

07/2022

File

1002.3 KB

Guide 07/2022 PDF 1002.3 KB
SFC5xxx DeviceNet communication interface reference

03/2023

File

796.4 KB

Guide 03/2023 PDF 796.4 KB
Software manual SFC5xxx/SFM5xxx

03/2022

File

1.3 MB

Guide 03/2022 PDF 1.3 MB
Python driver SFC5xxx/SFM5xxx

03/2022

Link

-

Software 03/2022 Link -
Recalibration tool software SFC5xxx/SFM5xxx

06/2022

File

-

Software 06/2022 File -
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software 03/2022 ZIP 1.7 MB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Software 04/2022 ZIP 1.1 MB
REACH and RoHS declaration SFM/SGM

11/2024

File

97.9 KB

Certificate 11/2024 PDF 97.9 KB
Gas flow sensors brochure

01/2024

File

622.9 KB

Flyer 01/2024 PDF 622.9 KB
Mass flow controllers brochure chinese

06/2024

File

633.9 KB

Flyer 06/2024 PDF 633.9 KB

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