Mass flow | |||
---|---|---|---|
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
| 0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100 | slm | |
Accuracy
0.2%FS or 2% SP
| 0.2%FS or 2% SP | ||
Maximum operating pressure
10
| 10 | bar | |
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
| Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
Fluidic connector ports
Downmount
| Downmount |
Generic | |||
---|---|---|---|
Supply voltage
14 - 26.4
| 14 - 26.4 | V | |
Average supply current
50000
| 50000 | uA | |
Max. supply current
320000
| 320000 | uA | |
Interfaces
RS485
| RS485 | ||
Size (LxWxH)
48 x 25 x 79.5
| 48 x 25 x 79.5 | mm³ |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.