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SFM5300

High-precision, configurable, fast, digital flow sensor for OEM

The SFM5300 mass flow meter enables the measurement of mass flows with outstanding accuracy (errors < 2%), long-term stability and repeatability. It boasts an impressive dynamic measurement range and a compact size. The SFM5300 mass flow meter is available with downmount connections and digital interfaces. The metal SFM5300 is the smaller variant of the SFM5400 mass flow meter and is exclusively for cost-sensitive OEM projects with high unit quantities. The outstanding performance of the SFM5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFM5300 mass flow meter. The SFM5300 mass flow meter is the valve-free version of the SFC5300 mass flow controller. The two sensor products have the same performance characteristics and are used in similar applications, meaning they can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5300 website.
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Specification

Gas flow
Typical accuracy0.2%FS or 2% SP0.2%FS or 2% SP
CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
Maximum operating pressure10bar10bar
Fluidic connector portsDownmountDownmount
Mass flow
Full scale flow rate0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100slm0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100slm
Accuracy0.2%FS or 2% SP0.2%FS or 2% SP
Maximum operating pressure10bar10bar
CalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flowAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flow
Fluidic connector portsDownmount
Generic
Supply voltage14 - 26.4V14 - 26.4V
Average supply current50000uA50000uA
Max. supply current320000uA320000uA
InterfacesRS485RS485
Size (LxWxH)48 x 25 x 79.5mm

Downloads

Datasheet SFC5300/SFM5300 & SFC5330/SFM5330
  • 05/2023•
  • PDF•
  • 895.6 KB
DatasheetDownload Datasheet SFC5300/SFM5300 & SFC5330/SFM533005/2023Download Datasheet SFC5300/SFM5300 & SFC5330/SFM5330PDFDownload Datasheet SFC5300/SFM5300 & SFC5330/SFM5330895.6 KBDownload Datasheet SFC5300/SFM5300 & SFC5330/SFM5330
Datasheet SFM5300
  • 10/2016•
  • PDF•
  • 568.9 KB
DatasheetDownload Datasheet SFM530010/2016Download Datasheet SFM5300PDFDownload Datasheet SFM5300568.9 KBDownload Datasheet SFM5300
Mounting plate SFX53xx
  • 07/2022•
  • STEP•
  • 196.0 KB
Drawings/CADDownload Mounting plate SFX53xx07/2022Download Mounting plate SFX53xxSTEPDownload Mounting plate SFX53xx196.0 KBDownload Mounting plate SFX53xx
STEP file SFM5300
  • 07/2022•
  • ZIP•
  • 5.4 MB
Drawings/CADDownload STEP file SFM530007/2022Download STEP file SFM5300ZIPDownload STEP file SFM53005.4 MBDownload STEP file SFM5300
Engineering guide SFC5xxx/SFM5xxx
  • 07/2023•
  • PDF•
  • 869.9 KB
Application noteDownload Engineering guide SFC5xxx/SFM5xxx07/2023Download Engineering guide SFC5xxx/SFM5xxxPDFDownload Engineering guide SFC5xxx/SFM5xxx869.9 KBDownload Engineering guide SFC5xxx/SFM5xxx
Reference and flow conversions
  • 09/2021•
  • PDF•
  • 293.7 KB
Application noteDownload Reference and flow conversions09/2021Download Reference and flow conversionsPDFDownload Reference and flow conversions293.7 KBDownload Reference and flow conversions
Reference and flow conversions calculator
  • XLSX•
  • 30.3 KB
Application noteDownload Reference and flow conversions calculatorDownload Reference and flow conversions calculatorXLSXDownload Reference and flow conversions calculator30.3 KBDownload Reference and flow conversions calculator
SHDLC Interface Reference SFM5xxx/SFC5xxx
  • PDF•
  • 665.2 KB
Application noteDownload SHDLC Interface Reference SFM5xxx/SFC5xxxDownload SHDLC Interface Reference SFM5xxx/SFC5xxxPDFDownload SHDLC Interface Reference SFM5xxx/SFC5xxx665.2 KBDownload SHDLC Interface Reference SFM5xxx/SFC5xxx
Quick start guide SFC5xxx/SFM5xxx
  • 09/2021•
  • PDF•
  • 369.3 KB
GuideDownload Quick start guide SFC5xxx/SFM5xxx09/2021Download Quick start guide SFC5xxx/SFM5xxxPDFDownload Quick start guide SFC5xxx/SFM5xxx369.3 KBDownload Quick start guide SFC5xxx/SFM5xxx
Recalibration tool SFC5xxx/SFM5xxx
  • 07/2022•
  • PDF•
  • 1002.3 KB
GuideDownload Recalibration tool SFC5xxx/SFM5xxx07/2022Download Recalibration tool SFC5xxx/SFM5xxxPDFDownload Recalibration tool SFC5xxx/SFM5xxx1002.3 KBDownload Recalibration tool SFC5xxx/SFM5xxx
SFC5xxx DeviceNet communication interface reference
  • 03/2023•
  • PDF•
  • 796.4 KB
GuideDownload SFC5xxx DeviceNet communication interface reference03/2023Download SFC5xxx DeviceNet communication interface referencePDFDownload SFC5xxx DeviceNet communication interface reference796.4 KBDownload SFC5xxx DeviceNet communication interface reference
Software manual SFC5xxx/SFM5xxx
  • PDF•
  • 1.3 MB
GuideDownload Software manual SFC5xxx/SFM5xxxDownload Software manual SFC5xxx/SFM5xxxPDFDownload Software manual SFC5xxx/SFM5xxx1.3 MBDownload Software manual SFC5xxx/SFM5xxx
Python driver SFC5xxx/SFM5xxx
  • Link•
SoftwareDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxxLinkDownload Python driver SFC5xxx/SFM5xxxDownload Python driver SFC5xxx/SFM5xxx
Recalibration tool software SFC5xxx/SFM5xxx
  • 06/2022•
  • File•
SoftwareDownload Recalibration tool software SFC5xxx/SFM5xxx06/2022Download Recalibration tool software SFC5xxx/SFM5xxxFileDownload Recalibration tool software SFC5xxx/SFM5xxxDownload Recalibration tool software SFC5xxx/SFM5xxx
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
  • 03/2022•
  • ZIP•
  • 1.7 MB
SoftwareDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx03/2022Download Software library LabVIEW, C, C# SFC5xxx/SFM5xxxZIPDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx1.7 MBDownload Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software SFC5xxx/SFM5xxx
  • 04/2022•
  • ZIP•
  • 1.1 MB
SoftwareDownload Software SFC5xxx/SFM5xxx04/2022Download Software SFC5xxx/SFM5xxxZIPDownload Software SFC5xxx/SFM5xxx1.1 MBDownload Software SFC5xxx/SFM5xxx
REACH and RoHS declaration SFM/SGM
  • 04/2026•
  • PDF•
  • 104.6 KB
CertificateDownload REACH and RoHS declaration SFM/SGM04/2026Download REACH and RoHS declaration SFM/SGMPDFDownload REACH and RoHS declaration SFM/SGM104.6 KBDownload REACH and RoHS declaration SFM/SGM
Gas flow sensors brochure
  • 10/2025•
  • PDF•
  • 497.6 KB
FlyerDownload Gas flow sensors brochure10/2025Download Gas flow sensors brochurePDFDownload Gas flow sensors brochure497.6 KBDownload Gas flow sensors brochure
  • All products
  • •Gas flow sensors
  • •SFM5xxx

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kitEK-F5xMass flow controllers

EK-F5x

Evaluation kit

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

Applications for this product

Air conditioners

Highest comfort and maximum energy efficiency enabled by advanced sensors for air conditioner

Learn more

Air purifiers

Air quality monitoring with our air purifier sensor

Learn more

IAQ Monitors

Make indoor environments safer, healthier, and more comfortable with advanced sensor monitoring

Learn more

CO₂ monitoring for better sleep quality

Understanding how ventilation impacts sleep, health, and recovery

Learn more

Combustion control

Sensor solution enabling precise, reliable combustion control

Learn more

Demand-controlled ventilators

Maximized well-being and optimum energy efficiency with our DCV sensor

Learn more

DNA sequencing

Enhanced instrument reliability through precise flow control and machine diagnostics

Learn more

Filter monitoring

Optimal strategy for replacing filters

Learn more

Gas meters

Gas meter module built for accuracy, durability, and future energy transitions

Learn more

Microfluidics

Enhanced instrument performance through precise microliter-flow control using our microfluidic flow sensor

Learn more

Transport of perishable goods

Sensors play a vital role in maintaining quality during the transport of perishable goods

Learn more

Transport of pharmaceutical goods

Sensors for pharmaceutical logistics that ensure safe, temperature-controlled transport

Learn more

Photoresist and dosing

Precise dosing when applying photoresist

Learn more

Refrigerator sensors

Advanced refrigerator sensor solutions for precise condensation control

Learn more

Room sensors

Precise visualization and characterization of indoor air

Learn more

Smart speakers

Air quality sensors turn smart speakers into intelligent indoor air monitors

Learn more

Thermostats

Why thermostats depend on accurate sensors

Learn more

VAV controllers

Drive and control solutions for airflow control

Learn more

Flow cytometry

Real-time direct flow measurements to count and sort cells

Learn more

Smart inhaler flow sensor

Smart Inhaler supporting asthma and COPD patients during inhalation

Learn more

Subcutaneous drug delivery

Miniaturized flow sensor in large‑volume injectors track drug delivery

Learn more

Mechanical ventilators

Precise and safe patient ventilation using ventilator flow sensors

Learn more

Anesthesia flow sensor

Unlock precise gas mixing at minimal flows with ultra-accurate anesthesia low flow sensors

Learn more
Downmount
48 x 25 x 79.5
mm

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