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SFM3020

  • All products
  • •Gas flow sensors
  • •SFM3xxx

Analog flow sensor for high-volume respiratory devices, 160 slm

The SFM3020 mass flow meter is the analog sibling of SFM3003 and particularly suitable for high-volume applications. The design of the flow channel results in a very low pressure drop, making it ideal for medical ventilation. The flow of air and oxygen at rates from -10slm to 160slm is measured with excellent accuracy and extremely high speed. The signal is internally linearized and temperature compensated and provided as an analog output voltage for easy read out. As part of the SFM3xxx platform, the SFM3020 is a versatile sensor solution for many different high-volume applications in which cost efficiency is the priority and analog the preferred interface. The outstanding performance of the SFM3020 sensor is based on Sensirion's patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.
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Specification

Gas flow
Full scale flow rate-10 - 160slm-10 - 160slm
Typical accuracy±2% m.v.±2% m.v.
CalibrationAir and O₂Air and O₂
Sensor outputFlowFlow
Maximum operating pressure1.3bar1.3bar
Fluidic connector portsMedical cone (22 mm)Medical cone (22 mm)
Generic
Supply voltage2.7 - 5.5V2.7 - 5.5V
Average supply current3800uA3800uA
Max. supply current5500uA5500uA
InterfacesAnalog voltageAnalog voltage
Size (LxWxH)82 x 35 x 32mm82 x 35 x 32mm

Downloads

Datasheet SFM3020
  • 08/2024•
  • PDF•
  • 516.5 KB
DatasheetDownload Datasheet SFM302008/2024Download Datasheet SFM3020PDFDownload Datasheet SFM3020516.5 KBDownload Datasheet SFM3020
Selection guide gas flow sensors
  • 12/2025•
  • PDF•
  • 563.3 KB
Application noteDownload Selection guide gas flow sensors12/2025Download Selection guide gas flow sensorsPDFDownload Selection guide gas flow sensors563.3 KBDownload Selection guide gas flow sensors
STEP file SFM3003, SFM3019, SFM3020
  • STEP•
  • 3.7 MB
Drawings/CADDownload STEP file SFM3003, SFM3019, SFM3020Download STEP file SFM3003, SFM3019, SFM3020STEPDownload STEP file SFM3003, SFM3019, SFM30203.7 MBDownload STEP file SFM3003, SFM3019, SFM3020
Datasheet SFM3505-300/SFM3505-300-X
  • 10/2025•
  • PDF•
  • 634.4 KB
DatasheetDownload Datasheet SFM3505-300/SFM3505-300-X10/2025Download Datasheet SFM3505-300/SFM3505-300-XPDFDownload Datasheet SFM3505-300/SFM3505-300-X634.4 KBDownload Datasheet SFM3505-300/SFM3505-300-X
Handling instructions SFM3xxx
  • 01/2021•
  • PDF•
  • 141.7 KB
Application noteDownload Handling instructions SFM3xxx01/2021Download Handling instructions SFM3xxxPDFDownload Handling instructions SFM3xxx141.7 KBDownload Handling instructions SFM3xxx
Reference and flow conversions
  • 09/2021•
  • PDF•
  • 293.7 KB
Application noteDownload Reference and flow conversions09/2021Download Reference and flow conversionsPDFDownload Reference and flow conversions293.7 KBDownload Reference and flow conversions
Reference and flow conversions calculator
  • XLSX•
  • 30.3 KB
Application noteDownload Reference and flow conversions calculatorDownload Reference and flow conversions calculatorXLSXDownload Reference and flow conversions calculator30.3 KBDownload Reference and flow conversions calculator
Engineering guide SFM
  • 01/2021•
  • PDF•
  • 592.1 KB
GuideDownload Engineering guide SFM01/2021Download Engineering guide SFMPDFDownload Engineering guide SFM592.1 KBDownload Engineering guide SFM
SEK-ControlCenter (all devices)
  • Link•
SoftwareDownload SEK-ControlCenter (all devices)Download SEK-ControlCenter (all devices)LinkDownload SEK-ControlCenter (all devices)Download SEK-ControlCenter (all devices)
Calibration certification gas flow sensors
  • 01/2023•
  • PDF•
  • 114.2 KB
CertificateDownload Calibration certification gas flow sensors01/2023Download Calibration certification gas flow sensorsPDFDownload Calibration certification gas flow sensors114.2 KBDownload Calibration certification gas flow sensors
REACH and RoHS declaration SFM/SGM
  • 04/2026•
  • PDF•
  • 104.6 KB
CertificateDownload REACH and RoHS declaration SFM/SGM04/2026Download REACH and RoHS declaration SFM/SGMPDFDownload REACH and RoHS declaration SFM/SGM104.6 KBDownload REACH and RoHS declaration SFM/SGM
Gas flow sensors brochure
  • 10/2025•
  • PDF•
  • 497.6 KB
FlyerDownload Gas flow sensors brochure10/2025Download Gas flow sensors brochurePDFDownload Gas flow sensors brochure497.6 KBDownload Gas flow sensors brochure

Applications for this product

Mechanical ventilators

Precise and safe patient ventilation using ventilator flow sensors

Learn more

Anesthesia flow sensor

Unlock precise gas mixing at minimal flows with ultra-accurate anesthesia low flow sensors

Learn more
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EMEA (Europe)

Part numberQuantityDistributor nameCountry
SFM3020-160-C0SOS electronicSKBuy
SFM30200Farnell UKGBBuy

The Americas

Part numberQuantityDistributor nameCountry
SFM3020211DigiKeyGlobalBuy
SFM302020NewarkUSBuy
SFM30200NewarkUSBuy
SFM30200Future Electronics NAGlobalBuy
SFM30200Braemac AmericasUSBuy
SFM30200Mouser ElectronicsUSBuy
SFM30200Arrow ElectronicsUSBuy