SFM6000-OEM
Best price-performance ratio, customizable version
<p>SFC6000 is very small and light and therefore allows the customer to optimize their devices in terms of size and weight. This is a decisive advantage, especially for portable devices. Furthermore, it offers great performance in terms of repeatability, accuracy, control range and speed. The SFC600 is highly integrated and has a very robust supply chain due to the very low number of electronic components used. Based on the thermal-mass measurement principle and using our proven CMOSens® MEMS technology, Sensirion builds radical mass flow controllers with best-in-class performance and speed, which, unlike most other devices on the market, do not drift and do not require in-service re-calibration. If you are looking for a mass flow meter, the SFM6000 is a valve-less sister variant of the SFC6000, offering the same performance at an even lower price. Applications: </p><ul><li>Semiconductor: front opening unified pods (FOUP), glass coating and treatment </li><li>Analytical instruments: gas chromatography, bioreactors </li><li>Medical equipment: anesthesia, ventilation, heart-lung machines, N2O therapy </li><li>Industrial automation</li></ul>
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate
2, 5, 20 and 50
| 2, 5, 20 and 50 | slm | |
| Full scale flow rate
500
| 500 | sccm | |
| Accuracy
0.2% FS or 2% SP
| 0.2% FS or 2% SP | ||
| Maximum operating pressure
10
| 10 | bar | |
| Calibration
Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses
| Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses | flow | |
| Fluidic connector ports
Push-in 6mm, downmount
| Push-in 6mm, downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage
22.8 - 25.2
| 22.8 - 25.2 | V | |
| Average supply current
10
| 10 | mA | |
| Max. supply current
20
| 20 | mA | |
| Interfaces
Analog voltage, I²C, RS485
| Analog voltage,I²C,RS485 | ||
| Size (LxWxH)
74 x 21 x 20
| 74 x 21 x 20 | mm³ |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
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