SFM6000-OEM

Best price-performance ratio, customizable version

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Specification

Mass flow
Full scale flow rate
2, 5, 20 and 50
2, 5, 20 and 50 slm
Full scale flow rate
500
500 sccm
Accuracy
0.2% FS or 2% SP
0.2% FS or 2% SP
Maximum operating pressure
10
10 bar
Calibration
Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses
Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses flow
Fluidic connector ports
Push-in 6mm, downmount
Push-in 6mm, downmount
Generic
Supply voltage
22.8 - 25.2
22.8 - 25.2 V
Average supply current
10
10 mA
Max. supply current
20
20 mA
Interfaces
Analog voltage, I²C, RS485
Analog voltage,I²C,RS485
Size (LxWxH)
74 x 21 x 20
74 x 21 x 20 mm³

Downloads

Name Type Date File Size
Datasheet SFC6000D/SFM6000D

05/2023

File

1.4 MB

Datasheet 05/2023 PDF 1.4 MB
Documentation I2C Interface SFC6000D and SFM6000D

07/2023

File

820.0 KB

Application note 07/2023 PDF 820.0 KB
Exchange fittings SFC/SFM6000

05/2023

File

449.8 KB

Application note 05/2023 PDF 449.8 KB
SHDLC Interface Reference SFC6xxx and SFM6xxx RS485

05/2023

File

842.0 KB

Application note 05/2023 PDF 842.0 KB
Quick start guide SFC/SFM6000 evaluation kit

01/2023

File

561.9 KB

Guide 01/2023 PDF 561.9 KB
SFX6000 Engineering Guide

07/2023

File

2.0 MB

Guide 07/2023 PDF 2.0 MB
STEP file SFC/SFM6000

03/2023

File

10.6 MB

Drawings/CAD 03/2023 ZIP 10.6 MB
Calibration certification gas flow sensors

01/2023

File

169.8 KB

Certificate 01/2023 PDF 169.8 KB
REACH and RoHS declaration SFM/SGM

11/2024

File

97.9 KB

Certificate 11/2024 PDF 97.9 KB
Gas flow sensors brochure

01/2024

File

622.9 KB

Flyer 01/2024 PDF 622.9 KB
Mass flow controllers brochure chinese

06/2024

File

633.9 KB

Flyer 06/2024 PDF 633.9 KB

Sensor evaluation

Buy the following products to evaluate this sensor

Name Description Series Category
EK-F5x
Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... EK-F5x Mass flow controllers

Download the respective viewer software to start measuring

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Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.