18 search results for "SFM5xxx"All 18Products 9Applications 0Pages 0News 0Specialist articles 0Downloads 9Events 0People 09 ProductsSee all product resultsSFM5400ActiveHigh-precision, configurable, fast, multi-gas flow sensorSFM5xxxGas flow sensorsSFM5300ActiveHigh-precision, configurable, fast, digital flow sensor for OEMSFM5xxxGas flow sensorsEK-F5xActiveEvaluation kitEK-F5xMass flow controllersSFM5500-50sccmActiveHigh-pressure mass flow meter for multiple gases, 50 sccmSFM5xxxGas flow sensorsSFM5500-0.5slmActiveHigh-pressure mass flow meter for multiple gases, 0.5 slmSFM5xxxGas flow sensorsLoad more9 DownloadsSee all download resultsEngineering guide SFC5xxx/SFM5xxx07.2023•PDF•869.9 KBGas flow sensors / Mass flow controllers / SFC5300 / SFC5400 / SFC5500 / SFM5xxx07.2023PDF869.9 KBPython driver SFC5xxx/SFM5xxxLink•-Gas flow sensors / Mass flow controllers / SFC5300 / SFC5400 / SFC5500 / SFM5xxxLink-Quick start guide SFC5xxx/SFM5xxx09.2021•PDF•369.3 KBGas flow sensors / Mass flow controllers / EK-F5x / SFC5300 / SFC5400 / SFC5500 / SFM5xxx09.2021PDF369.3 KBRecalibration tool SFC5xxx/SFM5xxx07.2022•PDF•1002.3 KBGas flow sensors / Mass flow controllers / SFC5300 / SFC5400 / SFC5500 / SFM5xxx07.2022PDF1002.3 KBRecalibration tool software SFC5xxx/SFM5xxx06.2022•MSI•1.7 MBSFC5300 / SFC5400 / SFC5500 / SFM5xxx06.2022MSI1.7 MBLoad more
