You searched forAll 18Products 9Applications 0Pages 0News 0Specialist articles 0Downloads 9Events 0People 09 ProductsSee all product resultsSFM5400High-precision, configurable, fast, multi-gas flow sensorSFM5xxxGas flow sensorsSFM5300High-precision, configurable, fast, digital flow sensor for OEMSFM5xxxGas flow sensorsEK-F5xEvaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and SFM6xxxEK-F5xMass flow controllersSFM5500-50sccmHigh-pressure mass flow meter for multiple gases, 50 sccmSFM5xxxGas flow sensorsSFM5500-0.5slmHigh-pressure mass flow meter for multiple gases, 0.5 slmSFM5xxxGas flow sensorsSFM5500-2slmHigh-pressure mass flow meter for multiple gases, 2 slmSFM5xxxGas flow sensorsSFM5500-10slmHigh-pressure mass flow meter for multiple gases, 10 slmSFM5xxxGas flow sensorsSFM5330High-precision, configurable, fast, digital flow sensor for OEMSFM5xxxGas flow sensorsSFM5460High-precision, configurable, fast, gas flow sensor for OEMSFM5xxxGas flow sensors9 DownloadsSee all download resultsEngineering guide SFC5xxx/SFM5xxx07.2023•PDF•869.9 KBGas flow sensors / Mass flow controllers / SFC5300 / SFC5400 / SFC5500 / SFM5xxx07.2023PDF869.9 KBPython driver SFC5xxx/SFM5xxxLink•-Gas flow sensors / Mass flow controllers / SFC5300 / SFC5400 / SFC5500 / SFM5xxxLink-Quick start guide SFC5xxx/SFM5xxx09.2021•PDF•369.3 KBGas flow sensors / Mass flow controllers / EK-F5x / SFC5300 / SFC5400 / SFC5500 / SFM5xxx09.2021PDF369.3 KBRecalibration tool SFC5xxx/SFM5xxx07.2022•PDF•1002.3 KBGas flow sensors / Mass flow controllers / SFC5300 / SFC5400 / SFC5500 / SFM5xxx07.2022PDF1002.3 KBRecalibration tool software SFC5xxx/SFM5xxx06.2022•MSI•1.7 MBSFC5300 / SFC5400 / SFC5500 / SFM5xxx06.2022MSI1.7 MBSHDLC Interface Reference SFM5xxx/SFC5xxxPDF•665.2 KBGas flow sensors / Mass flow controllers / SFC5300 / SFC5400 / SFC5500 / SFM5xxxPDF665.2 KBSoftware library LabVIEW, C, C# SFC5xxx/SFM5xxx03.2022•ZIP•1.7 MBGas flow sensors / Mass flow controllers / SFC5300 / SFC5400 / SFC5500 / SFM5xxx / EK-F5x03.2022ZIP1.7 MBSoftware manual SFC5xxx/SFM5xxxPDF•1.3 MBGas flow sensors / Mass flow controllers / EK-F5x / SFC5300 / SFC5400 / SFC5500 / SFM5xxxPDF1.3 MBSoftware SFC5xxx/SFM5xxx04.2022•ZIP•1.1 MBGas flow sensors / Mass flow controllers / EK-F5x / SFC5300 / SFC5400 / SFC5500 / SFM5xxx04.2022ZIP1.1 MB
