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4 Products
Name
Description
Series
Category
SFC6000-OEM
MFC with best price-performance ratio, customizable version
SFC6000
Mass flow controllers
Mass flow controllers
SFC6000D-50slm
Best price-performance ratio, distribution version, 50 slm
SFC6000
Mass flow controllers
Mass flow controllers
SFC6000D-20slm
Best price-performance ratio, distribution version, 20 slm
SFC6000
Mass flow controllers
Mass flow controllers
SFC6000D-5slm
Best price-performance ratio, distribution version, 5 slm
SFC6000
Mass flow controllers
Mass flow controllers
1 News articles
15.03.2023
Press release
The SFC6000 mass flow controller is available worldwide
2 Downloads
Name
Series
Date
Type
Size
Documentation I2C Interface SFC6000D and SFM6000D
07.2023
PDF
820.0 KB
Gas flow sensors
/
Mass flow controllers
/
SFC6000
/
SFM6000-OEM
07.2023
PDF
820.0 KB
Datasheet SFC6000D/SFM6000D
05.2023
PDF
1.4 MB
Gas flow sensors
/
Mass flow controllers
/
EK-F5x
/
SFC6000
/
SFM6000-OEM
05.2023
PDF
1.4 MB
