5 Products

3 News articles

4 Downloads

Name Series Date Type Size
Datasheet SFC5500/SFM5500
02.2024 PDF 975.3 KB
Gas flow sensors / Mass flow controllers / SFC5500 / SFC5500-0.5slm / SFC5500-10slm / SFC5500-200slm / SFC5500-2slm / SFC5500-50sccm / SFM5500-0.5slm / SFM5500-10slm / SFM5500-2slm / SFM5500-50sccm
02.2024
PDF 975.3 KB
STEP file SFC5500-200
02.2022 STEP 3.4 MB
Mass flow controllers / SFC5500-200slm
02.2022
STEP 3.4 MB
STEP file SFC5500-50sccm/0.5slm/2slm/10slm
04.2022 STEP 3.4 MB
Mass flow controllers / SFC5500-0.5slm / SFC5500-10slm / SFC5500-2slm / SFC5500-50sccm
04.2022
STEP 3.4 MB
Compatible fittings SFC5500/SFM5500
10.2022 PDF 193.4 KB
Gas flow sensors / Mass flow controllers / SFC5500-0.5slm / SFC5500-10slm / SFC5500-200slm / SFC5500-2slm / SFC5500-50sccm / SFM5500-0.5slm / SFM5500-10slm / SFM5500-2slm / SFM5500-50sccm
10.2022
PDF 193.4 KB