Datasheet SFC5500/SFM5500
02.2024
PDF
975.3 KB
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Gas flow sensors
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Mass flow controllers
/
SFC5500
/
SFC5500-0.5slm
/
SFC5500-10slm
/
SFC5500-200slm
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SFC5500-2slm
/
SFC5500-50sccm
/
SFM5500-0.5slm
/
SFM5500-10slm
/
SFM5500-2slm
/
SFM5500-50sccm
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02.2024
|
PDF
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975.3 KB
| |
STEP file SFC5500-200
02.2022
STEP
3.4 MB
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Mass flow controllers
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SFC5500-200slm
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02.2022
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STEP
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3.4 MB
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STEP file SFC5500-50sccm/0.5slm/2slm/10slm
04.2022
STEP
3.4 MB
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Mass flow controllers
/
SFC5500-0.5slm
/
SFC5500-10slm
/
SFC5500-2slm
/
SFC5500-50sccm
|
04.2022
|
STEP
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3.4 MB
| |
Compatible fittings SFC5500/SFM5500
10.2022
PDF
193.4 KB
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Gas flow sensors
/
Mass flow controllers
/
SFC5500-0.5slm
/
SFC5500-10slm
/
SFC5500-200slm
/
SFC5500-2slm
/
SFC5500-50sccm
/
SFM5500-0.5slm
/
SFM5500-10slm
/
SFM5500-2slm
/
SFM5500-50sccm
|
10.2022
|
PDF
|
193.4 KB
| |