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NRND

SFM3200

Flow sensor for inspiratory use in respiratory devices, 250 slm

he SFM3200 mass flow meter is best suitable for inspiratory flow measurements. In addition, an autoclavable / washable version is avaialble (SFM3200-AW), which is able to withstand autoclave procedures, making it reusable and suitable for expiratory flow measurements. The SFM3200 mass flow meter is characterized by its wide dynamic measurement range of up to 250 slm, as well as its measurement accuracy at low flows. The special design of the flow channel results in a very low pressure drop through the flow body of the sensor, which makes it extremely suitable for medical ventilation and other respiratory applications. The thermal sensor element assures very fast signal processing time and bidirectional measurement mode, with the signal being internally linearized and temperature compensated. The outstanding performance of the SFM3200 sensor is based on Sensirion's patented CMOSens® Technology. The technology allows the integration of the sensor element and the analysis electronics on a single, tiny CMOS silicon chip. The result is a highly stable and precise system for demanding and cost-sensitive applications.

Successor productSee inventoryDistributor listContact sales
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  • SFM3200

Successor product

NameDescriptionSeriesCategory
SFM3505-300Next generation compact flow sensor, 2.3% m.v. accuracySFM3xxxGas flow sensors

SFM3505-300

Next generation compact flow sensor, 2.3% m.v. accuracy

SFM3xxx

Gas flow sensors

Specification

Gas flow
Full scale flow rate-100 - 250slm-100 - 250slm
Typical accuracy±2% m.v.±2% m.v.
CalibrationAir and O₂Air and O₂
Sensor outputFlow and TFlow and T
Maximum operating pressure1.07bar1.07bar
Fluidic connector portsMedical cone (22 mm)Medical cone (22 mm)
Generic
Supply voltage4.75 - 5.5V4.75 - 5.5V
Max. supply current10000uA10000uA
InterfacesI²CI²C
Size (LxWxH)73 x 26 x 26.2mm73 x 26 x 26.2mm

Downloads

Datasheet SFM3200
  • 05/2022•
  • PDF•
  • 277.2 KB
DatasheetDownload Datasheet SFM320005/2022Download Datasheet SFM3200PDFDownload Datasheet SFM3200277.2 KBDownload Datasheet SFM3200
CRC checksum
  • 01/2020•
  • PDF•
  • 174.3 KB
Application noteDownload CRC checksum01/2020Download CRC checksumPDFDownload CRC checksum174.3 KBDownload CRC checksum
Selection guide gas flow sensors
  • 12/2025•
  • PDF•
  • 563.3 KB
Application noteDownload Selection guide gas flow sensors12/2025Download Selection guide gas flow sensorsPDFDownload Selection guide gas flow sensors563.3 KBDownload Selection guide gas flow sensors
SFM3x00 I²C Functional Description
  • 05/2022•
  • PDF•
  • 306.1 KB
Application noteDownload SFM3x00 I²C Functional Description05/2022Download SFM3x00 I²C Functional DescriptionPDFDownload SFM3x00 I²C Functional Description306.1 KBDownload SFM3x00 I²C Functional Description
Sample code SFM3000
  • ZIP•
  • 261.6 KB
SoftwareDownload Sample code SFM3000Download Sample code SFM3000ZIPDownload Sample code SFM3000261.6 KBDownload Sample code SFM3000
STEP file SFM3200
  • STEP•
  • 3.4 MB
Drawings/CADDownload STEP file SFM3200Download STEP file SFM3200STEPDownload STEP file SFM32003.4 MBDownload STEP file SFM3200
REACH and RoHS declaration SFM/SGM
  • 04/2026•
  • PDF•
  • 104.6 KB
CertificateDownload REACH and RoHS declaration SFM/SGM04/2026Download REACH and RoHS declaration SFM/SGMPDFDownload REACH and RoHS declaration SFM/SGM104.6 KBDownload REACH and RoHS declaration SFM/SGM
Datasheet SFM3505-300/SFM3505-300-X
  • 10/2025•
  • PDF•
  • 634.4 KB
DatasheetDownload Datasheet SFM3505-300/SFM3505-300-X10/2025Download Datasheet SFM3505-300/SFM3505-300-XPDFDownload Datasheet SFM3505-300/SFM3505-300-X634.4 KBDownload Datasheet SFM3505-300/SFM3505-300-X
Handling instructions SFM3xxx
  • 01/2021•
  • PDF•
  • 141.7 KB
Application noteDownload Handling instructions SFM3xxx01/2021Download Handling instructions SFM3xxxPDFDownload Handling instructions SFM3xxx141.7 KBDownload Handling instructions SFM3xxx
Reference and flow conversions
  • 09/2021•
  • PDF•
  • 293.7 KB
Application noteDownload Reference and flow conversions09/2021Download Reference and flow conversionsPDFDownload Reference and flow conversions293.7 KBDownload Reference and flow conversions
Reference and flow conversions calculator
  • XLSX•
  • 30.3 KB
Application noteDownload Reference and flow conversions calculatorDownload Reference and flow conversions calculatorXLSXDownload Reference and flow conversions calculator30.3 KBDownload Reference and flow conversions calculator
Engineering guide SFM
  • 01/2021•
  • PDF•
  • 592.1 KB
GuideDownload Engineering guide SFM01/2021Download Engineering guide SFMPDFDownload Engineering guide SFM592.1 KBDownload Engineering guide SFM
SEK-ControlCenter (all devices)
  • Link•
SoftwareDownload SEK-ControlCenter (all devices)Download SEK-ControlCenter (all devices)LinkDownload SEK-ControlCenter (all devices)Download SEK-ControlCenter (all devices)
Calibration certification gas flow sensors
  • 01/2023•
  • PDF•
  • 114.2 KB
CertificateDownload Calibration certification gas flow sensors01/2023Download Calibration certification gas flow sensorsPDFDownload Calibration certification gas flow sensors114.2 KBDownload Calibration certification gas flow sensors
Gas flow sensors brochure
  • 10/2025•
  • PDF•
  • 497.6 KB
FlyerDownload Gas flow sensors brochure10/2025Download Gas flow sensors brochurePDFDownload Gas flow sensors brochure497.6 KBDownload Gas flow sensors brochure
  • All products
  • •Gas flow sensors
  • •SFM3xxx

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
SEK-SensorBridgeConnecting bridge with two sensor portsSEK-SensorBridge
SEK-SFM3200Gas flow sensors evaluation kit SFM3200SFM3xxxGas flow sensors

SEK-SensorBridge

Connecting bridge with two sensor ports

SEK-SensorBridge

SEK-SFM3200

Gas flow sensors evaluation kit SFM3200

SFM3xxx

Gas flow sensors

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

Applications for this product

Mechanical ventilators

Precise and safe patient ventilation using ventilator flow sensors

Learn more

Anesthesia flow sensor

Unlock precise gas mixing at minimal flows with ultra-accurate anesthesia low flow sensors

Learn more

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