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NRND

SFM3100

  • All products
  • •Gas flow sensors
  • •SFM3xxx

Analog flow and gas temperature sensor, with cap, 240 slm

The analog mass flow meter SFM3100 is highly accurate and fast. The SFM3100 has a compact design and can be easily integrated into existing devices. There is a temperature sensor in the gas channel of the flow meter. This enables highly precise temperature compensation and obviates the need to integrate a dedicated temperature sensor. The SFM3100 measures flow ranges between -24 and +240 slm. It can also detect negative flow ranges, thereby recognizing errors or impeded flows in a reliable manner. At the same time, multiple gases are compensated with great precision. The flow rates and signal characteristics can be customized to meet customer-specific requirements. Like all Sensirion sensors, the analog mass flow sensor is based on the patented CMOSens® Technology, which combines the sensor and analysis electronics on a single microchip. The result is a highly stable and precise system for demanding and cost-sensitive applications. The SFM3100 is particularly suitable for inspiration applications as well as for mixing oxygen and air to a very precise degree.

Successor productSee inventoryDistributor listContact sales

Successor product

NameDescriptionSeriesCategory
SFM3505-300Next generation compact flow sensor, 2.3% m.v. accuracySFM3xxxGas flow sensors

SFM3505-300

Next generation compact flow sensor, 2.3% m.v. accuracy

SFM3xxx

Gas flow sensors

Specification

Gas flow
Full scale flow rate-24 - 240slm-24 - 240slm
Typical accuracy±2.5% m.v.±2.5% m.v.
CalibrationAir and O₂Air and O₂
Sensor outputFlow and TFlow and T
Maximum operating pressure

Downloads

Datasheet SFM3100
  • 04/2022•
  • PDF•
  • 454.2 KB
Datasheet04/2022PDF454.2 KB
Selection guide gas flow sensors
  • 12/2025•
  • PDF•
  • 563.3 KB
Application note12/2025PDF563.3 KB
STEP file SFM3100
  • STEP•
  • 8.7 MB
Drawings/CADSTEP8.7 MB
REACH and RoHS declaration SFM/SGM
  • 04/2026•
  • PDF•
  • 104.6 KB
Certificate04/2026PDF104.6 KB
Datasheet SFM3505-300/SFM3505-300-X
  • 10/2025•
  • PDF•
  • 634.4 KB
Datasheet10/2025PDF634.4 KB
Handling instructions SFM3xxx
  • 01/2021•
  • PDF•
  • 141.7 KB
Application note01/2021PDF141.7 KB
Reference and flow conversions
  • 09/2021•
  • PDF•
  • 293.7 KB
Application note09/2021PDF293.7 KB
Reference and flow conversions calculator
  • XLSX•
  • 30.3 KB
Application noteXLSX30.3 KB
Engineering guide SFM
  • 01/2021•
  • PDF•
  • 592.1 KB
Guide01/2021PDF592.1 KB
SEK-ControlCenter (all devices)
  • Link•
SoftwareLink
Calibration certification gas flow sensors
  • 01/2023•
  • PDF•
  • 169.8 KB
Certificate01/2023PDF169.8 KB
Gas flow sensors brochure
  • 10/2025•
  • PDF•
  • 497.6 KB
Flyer10/2025PDF497.6 KB
  • Home
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  • SFM3100
1.07
bar
1.07
bar
Fluidic connector portsO-ringO-ring
Generic
Supply voltage4.75 - 5.25V4.75 - 5.25V
Max. supply current150000uA150000uA
InterfacesAnalog voltageAnalog voltage
Size (LxWxH)57.5 x 27.5 x 29.4mm57.5 x 27.5 x 29.4mm

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.

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