SFC3000
NRNDPredecessor of the SFC5300 mass flow controller
The mass flow controller SFC3000 offers fast and accurate control of gas flows over a wide range. Its high accuracy and fast settling time is mainly based on the innovative CMOSens® Technology. Thereby the digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve.
The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.
Specification
| Mass flow | |||
|---|---|---|---|
| Accuracy ±0.2sccm ± 2% SP | ±0.2sccm ± 2% SP | ||
| Maximum operating pressure 5 | 5 | bar | |
| Calibration Air, He, H2 and Ar | Air, He, H2 and Ar | flow | |
| Fluidic connector ports Downmount | Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage 14.25 - 15.25 | 14.25 - 15.25 | V | |
| Max. supply current 330000 | 330000 | uA | |
| Interfaces RS485 | RS485 | ||
| Size (LxWxH) 70 x 25 x 73 | 70 x 25 x 73 | mm |
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