Predecessor of the SFC5300 mass flow controller
| Name | Description | Series | Category |
|---|---|---|---|
SFC5300 | MFC for cost-sensitive OEM projects with high unit quantities | SFC5300 | Mass flow controllers |
| Mass flow | |||
|---|---|---|---|
| Accuracy ±0.2sccm ± 2% SP | ±0.2sccm ± 2% SP | ||
| Maximum operating pressure 5 | 5 | bar | |
| Calibration Air, He, H2 and Ar | Air, He, H2 and Ar | flow | |
| Fluidic connector ports Downmount | Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage 14.25 - 15.25 | 14.25 - 15.25 | V | |
| Max. supply current 330000 | 330000 | uA | |
| Interfaces RS485 | RS485 | ||
| Size (LxWxH) 70 x 25 x 73 | 70 x 25 x 73 | mm |

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.