End of life
SFC3000
Predecessor of the SFC5300 mass flow controller
The mass flow controller SFC3000 offers fast and accurate control of gas flows over a wide range. Its high accuracy and fast settling time is mainly based on the innovative CMOSens® Technology. Thereby the digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve.
The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.
Successor product
| Name | Description | Series | Category |
|---|---|---|---|
 SFC5300 | MFC for cost-sensitive OEM projects with high unit quantities | SFC5300 | Mass flow controllers |
Specification
| Mass flow | |||
|---|---|---|---|
| Accuracy±0.2sccm ± 2% SP | ±0.2sccm ± 2% SP | ||
| Maximum operating pressure5bar | 5 | bar | |
| CalibrationAir, He, H2 and Arflow | Air, He, H2 and Ar | flow | |
| Fluidic connector portsDownmount | Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage14.25 - 15.25V | 14.25 - 15.25 | V | |
| Max. supply current330000uA | 330000 | uA | |
| InterfacesRS485 | RS485 | ||
| Size (LxWxH)70 x 25 x 73mm | 70 x 25 x 73 | mm |
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Applications for this product
