SFC3000

NRND

Predecessor of the SFC5300 mass flow controller

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Successor product

Name Description Series Category
SFC5300
MFC for cost-sensitive OEM projects with high unit quantities SFC5300 Mass flow controllers

Specification

Mass flow
Accuracy
±0.2sccm ± 2% SP
±0.2sccm ± 2% SP
Maximum operating pressure
5
5 bar
Calibration
Air, He, H2 and Ar
Air, He, H2 and Ar flow
Fluidic connector ports
Downmount
Downmount
Generic
Supply voltage
14.25 - 15.25
14.25 - 15.25 V
Max. supply current
330000
330000 uA
Interfaces
RS485
RS485
Size (LxWxH)
70 x 25 x 73
70 x 25 x 73 mm³

Downloads

Name Type Date File Size
Datasheet SFC3000 (end of life)

11/2008

File

152.8 KB

Datasheet 11/2008 PDF 152.8 KB
Mean time between failures analysis

08/2022

File

202.9 KB

Application note 08/2022 PDF 202.9 KB
Selection guide mass flow controllers

11/2023

File

347.8 KB

Application note 11/2023 PDF 347.8 KB
REACH and RoHS declaration SFC

11/2024

File

90.5 KB

Certificate 11/2024 PDF 90.5 KB
Mass flow controllers brochure

05/2024

File

540.8 KB

Flyer 05/2024 PDF 540.8 KB

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