SFC3000
NRNDPredecessor of the SFC5300 mass flow controller
The mass flow controller SFC3000 offers fast and accurate control of gas flows over a wide range. Its high accuracy and fast settling time is mainly based on the innovative CMOSens® Technology. Thereby the digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve. The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.
Successor product
| Name | Description | Series | Category |
|---|---|---|---|
 SFC5300 | MFC for cost-sensitive OEM projects with high unit quantities | SFC5300 | Mass flow controllers |
Specification
| Mass flow | |||
|---|---|---|---|
| Accuracy
±0.2sccm ± 2% SP
| ±0.2sccm ± 2% SP | ||
| Maximum operating pressure
5
| 5 | bar | |
| Calibration
Air, He, H2 and Ar
| Air, He, H2 and Ar | flow | |
| Fluidic connector ports
Downmount
| Downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage
14.25 - 15.25
| 14.25 - 15.25 | V | |
| Max. supply current
330000
| 330000 | uA | |
| Interfaces
RS485
| RS485 | ||
| Size (LxWxH)
70 x 25 x 73
| 70 x 25 x 73 | mm³ |
Downloads
Latest Mass flow controllers
SFC6000-OEM
MFC with best price-performance ratio, customizable version
- Sensor
- Mass flow controllers
SFC6000D-50slm
Best price-performance ratio, distribution version, 50 slm
- Sensor
- Mass flow controllers
SFC6000D-20slm
Best price-performance ratio, distribution version, 20 slm
- Sensor
- Mass flow controllers
SFC6000D-5slm
Best price-performance ratio, distribution version, 5 slm
- Sensor
- Mass flow controllers
SFC5460
Versatile MFC for OEM projects with high unit quantities
- Sensor
- Mass flow controllers
SFC5500-2slm
Versatile mass flow controller, via online distribution, 2 slm
- Sensor
- Mass flow controllers
SFC5500-50sccm
Versatile mass flow controller, via online distribution, 50sccm
- Sensor
- Mass flow controllers
Smart sensors for your application
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.