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Back to catalog

SFM6000D-5slm

  • All products
  • •Gas flow sensors
  • •SFM6000-OEM

Best price-performance ratio, distribution version, 5 slm

The SFM6000 is a valve-less sister variant of the SFC6000 mass flow controller, offering a great performance at an even lower price. The SFC6000 mass flow controller is Sensirion’s next generation mass flow controller, impressing with an unbeatable priceperformance ratio and a very attractive delivery time of eight weeks. While the industry is currently struggling with delivery times of 30 to 53 weeks, SFC6000 samples are available within two to four weeks. In addition, selected SFC6000 configurations are available in distribution, meaning you can order them for initial testing and evaluation today and have the product in your mailbox tomorrow. The SFC6000 is very small and light and therefore allows the customer to optimize their devices in terms of size and weight. This is a decisive advantage, especially for portable devices. Furthermore, it offers great performance in terms of repeatability, accuracy, control range and speed. The SFC600 is highly integrated and has a very robust supply chain due to the very low number of electronic components used. Based on the thermal-mass measurement principle and using our proven CMOSens® MEMS technology, Sensirion builds radical mass flow controllers with best-in-class performance and speed, which, unlike most other devices on the market, do not drift and do not require in-service re-calibration. Applications: -Semiconductor: front opening unified pods (FOUP), glass coating and treatment -Analytical instruments: gas chromatography, bioreactors -Medical equipment: anesthesia, ventilation, heart-lung machines, N2O therapy -Industrial automation

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Specification

Gas flow
Typical accuracy0.2% FS or 2% SP0.2% FS or 2% SP
CalibrationAir, N₂, O₂, N₂O, Ar and CO₂Air, N₂, O₂, N₂O, Ar and CO₂
Maximum operating pressure10bar10bar
Fluidic connector portsPush-in 6mm, downmountPush-in 6mm, downmount
Mass flow
Full scale flow rate5slm5slm
Full scale flow rate5000sccm5000sccm
Accuracy0.2% FS or 2% SP0.2% FS or 2% SP
Maximum operating pressure10bar10bar
CalibrationAir, N₂, O₂, N₂O, Ar and CO₂flowAir, N₂, O₂, N₂O, Ar and CO₂flow
Fluidic connector portsPush-in 6mm, downmountPush-in 6mm, downmount
Generic
Supply voltage22.8 - 25.2V22.8 - 25.2V
Average supply current10mA10mA
Max. supply current20mA20mA
InterfacesI²C, RS485I²C, RS485
Size (LxWxH)74 x 40 x 20mm74 x 40 x 20mm

Downloads

Datasheet SFC6000D/SFM6000D
  • 05/2023•
  • PDF•
  • 1.4 MB
DatasheetDownload Datasheet SFC6000D/SFM6000D05/2023Download Datasheet SFC6000D/SFM6000DPDFDownload Datasheet SFC6000D/SFM6000D1.4 MBDownload Datasheet SFC6000D/SFM6000D
Documentation I2C Interface SFC6000D and SFM6000D
  • 07/2023•
  • PDF•
  • 820.0 KB
Application noteDownload Documentation I2C Interface SFC6000D and SFM6000D07/2023Download Documentation I2C Interface SFC6000D and SFM6000DPDFDownload Documentation I2C Interface SFC6000D and SFM6000D820.0 KBDownload Documentation I2C Interface SFC6000D and SFM6000D
Exchange fittings SFC/SFM6000
  • 05/2023•
  • PDF•
  • 449.8 KB
Application noteDownload Exchange fittings SFC/SFM600005/2023Download Exchange fittings SFC/SFM6000PDFDownload Exchange fittings SFC/SFM6000449.8 KBDownload Exchange fittings SFC/SFM6000
SHDLC Interface Reference SFC6xxx and SFM6xxx RS485
  • 05/2023•
  • PDF•
  • 842.0 KB
Application noteDownload SHDLC Interface Reference SFC6xxx and SFM6xxx RS48505/2023Download SHDLC Interface Reference SFC6xxx and SFM6xxx RS485PDFDownload SHDLC Interface Reference SFC6xxx and SFM6xxx RS485842.0 KBDownload SHDLC Interface Reference SFC6xxx and SFM6xxx RS485
Quick start guide SFC/SFM6000 evaluation kit
  • 01/2023•
  • PDF•
  • 561.9 KB
GuideDownload Quick start guide SFC/SFM6000 evaluation kit01/2023Download Quick start guide SFC/SFM6000 evaluation kitPDFDownload Quick start guide SFC/SFM6000 evaluation kit561.9 KBDownload Quick start guide SFC/SFM6000 evaluation kit
SFX6000 Engineering Guide
  • 07/2023•
  • PDF•
  • 2.0 MB
GuideDownload SFX6000 Engineering Guide07/2023Download SFX6000 Engineering GuidePDFDownload SFX6000 Engineering Guide2.0 MBDownload SFX6000 Engineering Guide
STEP file SFC/SFM6000
  • 03/2023•
  • ZIP•
  • 10.6 MB
Drawings/CADDownload STEP file SFC/SFM600003/2023Download STEP file SFC/SFM6000ZIPDownload STEP file SFC/SFM600010.6 MBDownload STEP file SFC/SFM6000
Calibration certification gas flow sensors
  • 01/2023•
  • PDF•
  • 114.2 KB
CertificateDownload Calibration certification gas flow sensors01/2023Download Calibration certification gas flow sensorsPDFDownload Calibration certification gas flow sensors114.2 KBDownload Calibration certification gas flow sensors
REACH and RoHS declaration SFM/SGM
  • 04/2026•
  • PDF•
  • 104.6 KB
CertificateDownload REACH and RoHS declaration SFM/SGM04/2026Download REACH and RoHS declaration SFM/SGMPDFDownload REACH and RoHS declaration SFM/SGM104.6 KBDownload REACH and RoHS declaration SFM/SGM
Gas flow sensors brochure
  • 10/2025•
  • PDF•
  • 497.6 KB
FlyerDownload Gas flow sensors brochure10/2025Download Gas flow sensors brochurePDFDownload Gas flow sensors brochure497.6 KBDownload Gas flow sensors brochure

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kitEK-F5xMass flow controllers

EK-F5x

Evaluation kit

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

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Applications for this product

Bioreactors

Bioreactor sensor solutions for precise, stable, and high-yield cell cultivation

Learn more

Mechanical ventilators

Precise and safe patient ventilation using ventilator flow sensors

Learn more

Anesthesia flow sensor

Unlock precise gas mixing at minimal flows with ultra-accurate anesthesia low flow sensors

Learn more

Heart-lung-machines

Takeover of heart and lung function during surgery

Learn more

High-flow ventilators

Heated, humidified high-flow oxygen

Learn more

Nitric oxide therapy

Controlled delivery enabled through a nitric oxide sensor

Learn more
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