Mass flow | |||
---|---|---|---|
Full scale flow rate
5
| 5 | slm | |
Full scale flow rate
5000
| 5000 | sccm | |
Accuracy
0.2% FS or 2% SP
| 0.2% FS or 2% SP | ||
Maximum operating pressure
10
| 10 | bar | |
Calibration
Air, N₂, O₂, N₂O, Ar and CO₂
| Air, N₂, O₂, N₂O, Ar and CO₂ | flow | |
Fluidic connector ports
Push-in 6mm, downmount
| Push-in 6mm, downmount |
Generic | |||
---|---|---|---|
Supply voltage
22.8 - 25.2
| 22.8 - 25.2 | V | |
Average supply current
10
| 10 | mA | |
Max. supply current
20
| 20 | mA | |
Interfaces
I²C, RS485
| I²C,RS485 | ||
Size (LxWxH)
74 x 40 x 20
| 74 x 40 x 20 | mm³ |
Buy the following products to evaluate this sensor
Name | Description | Series | Category |
---|---|---|---|
EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.