19 Products

5 Downloads

Name Series Date Type Size
Sample code SFM3xxx sensorbridge
02.2022 Link -
Mass flow controllers / SEK-SFM3019 / SFM3003-300-CE / SFM3003-300-CL / SFM3013-300-CL / SFM3013-300-CLM / SFM3019 / SFM3119
02.2022
Link -
Sample code SFM3xxx 0.1.3
02.2022 Link -
Mass flow controllers / SFM3003-300-CE / SFM3003-300-CL / SFM3013-300-CL / SFM3013-300-CLM / SFM3019 / SFM3119
02.2022
Link -
Sample code SFM3xxx
02.2022 Link -
Mass flow controllers / SEK-SFM3000 / SEK-SFM3XXX-AW/D EVALUATION KIT / SFM3003-300-CE / SFM3003-300-CL / SFM3013-300-CL / SFM3013-300-CLM / SFM3019 / SFM3119
02.2022
Link -
Handling instructions SFM3xxx
01.2021 PDF 141.7 KB
Gas flow sensors / SFM3xxx
01.2021
PDF 141.7 KB
SFM3xxx I²C Functional Description
05.2022 PDF 306.1 KB
Mass flow controllers / SFM3xxx-AW/D / SFM3000-200 / SFM3000-200-C / SFM3200
05.2022
PDF 306.1 KB