SFC5300Back to catalogFiltersProduct categoryMass flow controllers2Humidity sensors0Temperature sensors0NOx & VOC sensors0Formaldehyde sensors0CO₂ sensors0Particulate matter sensors0Liquid flow sensors0Differential pressure sensors0Gas flow sensors0Gas metering solutions0Refrigerants sensors0ClassSensor2Accessory0Development board0Evaluation kit0Reference design0Product statusActive2Upcoming0New0Not recommended for new designs0Last time buy0Obsolete0InterfaceRS4852I²C0Sensibus0PWM0SDM0UART0RS2320Switch0Device net0IO link0ModBus0Analog voltage0Analog current0Compare SFC5330Small MFC for cost-sensitive OEM projects with high unit quantitiesFull scale flow rate1, 2 and 5 slmAccuracy0.2%FS or 2% SPCalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flowMaximum operating pressure10 barFluidic connector portsDownmountInterfacesRS485Supply voltage14 - 26.4 VSize (LxWxH)34 x 25 x 62.2 mmSensorMass flow controllersCompare SFC5300MFC for cost-sensitive OEM projects with high unit quantitiesFull scale flow rate1, 2, 5 and 10 slmAccuracy0.2%FS or 2% SPCalibrationAir, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flowMaximum operating pressure10 barFluidic connector portsDownmountInterfacesRS485Supply voltage14 - 26.4 VSize (LxWxH)48 x 25 x 79.5 mmSensorMass flow controllers
