SLQ-QT105
High purity liquid flow sensor for hydrocarbons at up to 120 ml/min
Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates of up to 120 ml/min of hydrocarbon based liquids like photoresists and solvents. Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability. For water-based liquids or highly viscous fluids with flow rates of up to 120 ml/min, please see our liquid flow meter SLQ-QT500.
Specification
| Liquid flow | |||
|---|---|---|---|
| Full scale flow rate (IPA)
120
| 120 | ml/min | |
| Accuracy (IPA)
10
| 10 | % | |
| Repeatability (IPA)
2
| 2 | % | |
| Maximum operating pressure
12
| 12 | bar | |
| Fluidic connector ports
Super 300 type pillar fitting 4x3
| Super 300 type pillar fitting 4x3 |
| Generic | |||
|---|---|---|---|
| Supply voltage
4.5 - 5.5
| 4.5 - 5.5 | V | |
| Average supply current
20
| 20 | mA | |
| Max. supply current
100
| 100 | mA | |
| Interfaces
Analog voltage, Analog current, I²C, RS485
| Analog voltage,Analog current,I²C,RS485 | ||
| Size (LxWxH)
65 x 33.5 x 20
| 65 x 33.5 x 20 | mm³ |
Downloads
Accessories
| Name | Description | Series | Category |
|---|---|---|---|
 SCC1-Analog | Adapter cable for liquid flow sensors, analog voltage output, 2m | SCC1 | Liquid flow |
| SCC1-Current | Adapter cable for liquid flow sensors, analog current output, 5m | SCC1 | Liquid flow |
| SCC1-RS485 | Adapter cable for liquid flow sensors, RS485 interface, 2m | SCC1 | Liquid flow |
 SCC1-USB | Adapter cable for liquid flow sensors, USB interface, 2m | SCC1 | Liquid flow |
SCC1-Analog
Adapter cable for liquid flow sensors, analog voltage output, 2m
SCC1
Liquid flow SCC1-Current
Adapter cable for liquid flow sensors, analog current output, 5m
SCC1
Liquid flow SCC1-RS485
Adapter cable for liquid flow sensors, RS485 interface, 2m
SCC1
Liquid flow SCC1-USB
Adapter cable for liquid flow sensors, USB interface, 2m
SCC1
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