SLQ-QT105
High purity liquid flow sensor for hydrocarbons at up to 120 ml/min
Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates of up to 120 ml/min of hydrocarbon based liquids like photoresists and solvents.
Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.
For water-based liquids or highly viscous fluids with flow rates of up to 120 ml/min, please see our liquid flow meter SLQ-QT500.
Specification
| Liquid flow | |||
|---|---|---|---|
| Full scale flow rate (IPA) 120 | 120 | ml/min | |
| Accuracy (IPA) 10 | 10 | % | |
| Repeatability (IPA) 2 | 2 | % | |
| Maximum operating pressure 12 | 12 | bar | |
| Fluidic connector ports Super 300 type pillar fitting 4x3 | Super 300 type pillar fitting 4x3 |
| Generic | |||
|---|---|---|---|
| Supply voltage 4.5 - 5.5 | 4.5 - 5.5 | V | |
| Average supply current 20 | 20 | mA | |
| Max. supply current 100 | 100 | mA | |
| Interfaces Analog voltage, Analog current, I²C, RS485 | Analog voltage, Analog current, I²C, RS485 | ||
| Size (LxWxH) 65 x 33.5 x 20 | 65 x 33.5 x 20 | mm |
