4 Products

5 Downloads

Name Series Date Type Size
Documentation I2C Interface SFC6000D and SFM6000D
07.2023 PDF 820.0 KB
Gas flow sensors / Mass flow controllers / SFC6000-OEM / SFM6000-OEM
07.2023
PDF 820.0 KB
STEP file SFC/SFM6000
03.2023 ZIP 10.6 MB
Gas flow sensors / Mass flow controllers / SFC6000-OEM / SFM6000-OEM
03.2023
ZIP 10.6 MB
Datasheet SFC6000D/SFM6000D
05.2023 PDF 1.4 MB
Gas flow sensors / Mass flow controllers / EK-F5x / SFC6000-OEM / SFM6000-OEM
05.2023
PDF 1.4 MB
Exchange fittings SFC/SFM6000
05.2023 PDF 449.8 KB
Gas flow sensors / Mass flow controllers / SFC6000-OEM / SFM6000-OEM
05.2023
PDF 449.8 KB
Quick start guide SFC/SFM6000 evaluation kit
01.2023 PDF 561.9 KB
Gas flow sensors / Mass flow controllers / EK-F5x / SFC6000-OEM / SFM6000-OEM
01.2023
PDF 561.9 KB