SLGBack to catalogFiltersProduct categoryLiquid flow sensors3Humidity sensors0Temperature sensors0NOx & VOC sensors0Formaldehyde sensors0CO₂ sensors0Particulate matter sensors0Differential pressure sensors0Gas flow sensors0Mass flow controllers0Gas metering solutions0Refrigerants sensors0ClassSensor3Accessory0Development board0Evaluation kit0Reference design0Product statusActive1Obsolete2Upcoming0New0Not recommended for new designs0Last time buy0InterfaceI²C3RS4853Analog voltage3Analog current3Sensibus0PWM0SDM0UART0RS2320Switch0Device net0IO link0ModBus0Compare SLG-0075Ultra-low flow rates and UHPLC applications up to 5 µl/minFull scale flow rate(H2O)5 ul/minAccuracy(H2O)10 %Repeatability(H2O)0.6 %Maximum operating pressure1200 barFluidic connector ports10-32 coned portInterfacesAnalog voltage, Analog current, I²C, RS485Supply voltage4 - 6 VAverage supply current5.1 mASensorLiquid flow sensorsObsoleteCompare SLG-0150Ultra-low flow rates and UHPLC applications up to 8 µl/minFull scale flow rate(H2O)8 ul/minAccuracy(H2O)5 %Repeatability(H2O)0.5 %Maximum operating pressure500 barFluidic connector ports10-32 coned portInterfacesAnalog voltage, Analog current, I²C, RS485Supply voltage4 - 6 VAverage supply current5.1 mASensorLiquid flow sensorsObsoleteCompare SLG-0025Ultra-low flow rates and UHPLC applications up to 1.5 ul/minFull scale flow rate(H2O)1.5 ul/minAccuracy(H2O)10 %Repeatability(H2O)0.6 %Maximum operating pressure1200 barFluidic connector ports10-32 coned portInterfacesAnalog voltage, Analog current, I²C, RS485Supply voltage4 - 6 VAverage supply current5.1 mASensorLiquid flow sensors