Back to catalogSLGFiltersProduct categoryLiquid flow sensors3Humidity sensors0Temperature sensors0NOx & VOC sensors0Formaldehyde sensors0CO₂ sensors0Particulate matter sensors0Differential pressure sensors0Gas flow sensors0Mass flow controllers0Gas metering solutions0Refrigerants sensors0O₂ sensors0ClassSensor3Accessory0Development board0Evaluation kit0Reference design0Product statusActive1End of life2Upcoming0New0Not recommended for new designs0Last time buy0InterfaceI²C3RS4853Analog voltage3Analog current3Sensibus0PWM0SDM0UART0RS2320Switch0Device net0IO link0ModBus0Show archived productsSimplify product viewCompare SLG-0075Ultra-low flow rates and UHPLC applications up to 5 µl/minSensorLiquid flow sensors