EK-F5xBack to catalogFiltersProduct categoryMass flow controllers1Humidity sensors0Temperature sensors0NOx & VOC sensors0Formaldehyde sensors0CO₂ sensors0Particulate matter sensors0Liquid flow sensors0Differential pressure sensors0Gas flow sensors0Gas metering solutions0Refrigerants sensors0ClassEvaluation kit1Accessory0Development board0Reference design0Sensor0Product statusActive1Upcoming0New0Not recommended for new designs0Last time buy0Obsolete0InterfaceI²C0Sensibus0PWM0SDM0UART0RS2320RS4850Switch0Device net0IO link0ModBus0Analog voltage0Analog current0Compare EK-F5xEvaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and SFM6xxxEvaluation kit for SFC5xxx and SFC6xxx mass flow controllers, and SFM5xxx and SFM6xxx mass flow meters. Includes: - 1x RS485-to-USB adapter with DB9 connection for SFC5xxx and SFM5xxx - 1x adapter with M8 connector for SFC6xxx and SFM6xxx - 1x 100-240V AC adapter with interchangeable plugs for worldwide sockets - 2x quick start guides- Sensor is sold separatelyEvaluation kitMass flow controllers