11.07.2022, News

High purity liquid flow sensor available from distributors now

High purity liquid flow sensor for hydrocarbons at up to 2 ml/s.

Designed to be integrated within demanding coating systems, the SLQ-QT105 flow sensor is a semiconductor-grade-sensor solution for liquid flow rates of up to 120 ml/min of hydrocarbon-based liquids like photoresists and solvents.  

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Based on Sensirion’s proven thermal microsensor technology, it breaks new ground when it comes to crucial metrics such as sensitivity, reliability and speed. The short response time of the SLQ-QT105 enables accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4 x 3 mm PFA tubing, this reliable device works without any moving parts, and can non-invasively measure through the wall of a straight flow path. A smart digital interface and robust RS485 communication are offered for long distance and bus capability.  

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