SFC4x00Back to catalogFiltersProduct categoryMass flow controllers1Humidity sensors0Temperature sensors0NOx & VOC sensors0Formaldehyde sensors0CO₂ sensors0Particulate matter sensors0Liquid flow sensors0Differential pressure sensors0Gas flow sensors0Gas metering solutions0Refrigerants sensors0ClassSensor1Accessory0Development board0Evaluation kit0Reference design0Product statusObsolete1Upcoming0New0Active0Not recommended for new designs0Last time buy0InterfaceAnalog voltage1I²C0Sensibus0PWM0SDM0UART0RS2320RS4850Switch0Device net0IO link0ModBus0Analog current0ObsoleteCompare SFC4000Predecessor of the SFC5400 mass flow controllerFull scale flow rate1, 2, 5 and 10 slmAccuracy0.2%FS or 2% SPCalibrationAir, O2, N2, Ar and CO2 flowMaximum operating pressure10 barFluidic connector portsSwagelock, VCO, VCR, DownmountInterfacesAnalog voltageSupply voltage14 - 26.4 VSize (LxWxH)105 x 38.5 x 90.5 mmSensorMass flow controllers