SFC3x00

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SFC3000
NRND

SFC3000

Predecessor of the SFC5300 mass flow controller

Full scale flow rate
-
Accuracy
±0.2sccm ± 2% SP
Calibration
Air, He, H2 and Ar flow
Maximum operating pressure
5 bar
Fluidic connector ports
Downmount
Interfaces
RS485
Supply voltage
14.25 - 15.25 V
Size (LxWxH)
70 x 25 x 73 mm
  • Sensor
  • Mass flow controllers