20.06.2025, News

What if your mass flow controller could talk?

It might tell you why your coating process isn’t as stable as it could be - or how others in the industry are solving the same challenges.

At Sensirion, we’re launching a collaborative industry study on the use of mass flow controllers (MFCs) in PVD, CVD, ALD, and other coating applications - from semiconductors to glass and battery coatings.

Why participate?
- Get early access to benchmarking data on MFC performance, challenges, and trends
- Discover how your peers are optimizing flow control in demanding environments
- Help shape the future of coating process control

The study is short, insightful, and designed to benefit you as much as it does us.

Let’s uncover what’s really happening inside our coating chambers together.

Take part now!

Featured series and products

SFC5300

Compact mass flow controller for OEM applications

The SFC5300 mass flow controller measures and control mass flows with outstanding accuracy, long-term stability and repeatability. It boasts a compact size and an impressive dynamic measurement range. The body housing of the SFC5300 is metal. The SFC5300 mass flow controller is available with downmount connections and two digital interfaces. The SFC5300 is the smaller variant of the SFC5400 mass flow controller and is for cost-sensitive OEM projects with high unit quantities. As all Sensirion sensors, the outstanding performance of the SFC5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFC5300 mass flow controller. The SFC5300 mass flow controller is available as valve-free version too. The two sensor products have the same performance characteristics and are used in similar applications, meaning they can be ideally combined. You can find further information and detailed specifications about the mass flow meter on the SFM5300 website. For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.

SFC5400

High performance and versatile mass flow controller

The SFC5400 mass flow controller measures and controls mass flows with outstanding accuracy, long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFC5400 highly configurable and its body housing is made of metal. Furthermore, the flow controller is available with various interfaces and a variety of fluidic connections and measures maximum flow rates from 50 sccm up to 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow controller can check whether the activated gas calibration matches the actual gas present. The versatility of the SFC5400 makes it the ideal solution for industrial and medical applications. The SFC5400 mass flow controller is, as all sensor products, based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip and guarantees an outstanding performance. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow controller. The SFC5400 mass flow controller is available as valve-free version too. The SFM5400 mass flow meter has the same performance characteristics as the mass flow controller and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFM5400 website. For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.

SFC5500

Versatile mass flow controller, via online distribution

SFC5500 mass flow controller series represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow controller with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration. Thanks to the exceptionally high control range enabled by the CMOSens® MEMS flow sensor, SFC5500 series can cover multiple flow ranges of a traditional mass flow controller in a single device. Coupled with multi-gas calibration and exchangeable fittings, SFC5500 series are the first mass flow controllers on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFC5500 series are also the first mass flow controllers available via catalogue distribution. SFC5500 series complements the SFC5xxx family of Sensirion’s best-in-class mass flow Controllers, offering the same top performance as SFC5400 and is thus suited for a broad range of applications where best accuracy, highest speed and widest dynamic range are needed. However, unlike the highly configurable SFC5400 series, SFC5500 series mass flow controllers are available in several standard pre-configured variants. For other gases, flow ranges, fittings and interfaces please check SFC5400, or Sensirion’s most cost-efficient solution for large OEM projects – SFC5300. If you are looking for a mass flow meter, SFM5500 is a valve-less sister variant of SFC5500 offering the same great performance.

SFC6000

Upcoming

Great performance, low price and short lead time

The SFC6000 mass flow controller is Sensirion’s next generation mass flow controller, impressing with an unbeatable priceperformance ratio and a very attractive delivery time of eight weeks. While the industry is currently struggling with delivery times of 30 to 53 weeks, SFC6000 samples are available within two to four weeks. In addition, selected SFC6000 configurations are available in distribution, meaning you can order them for initial testing and evaluation today and have the product in your mailbox tomorrow.

The SFC6000 is very small and light and therefore allows the customer to optimize their devices in terms of size and weight. This is a decisive advantage, especially for portable devices. Furthermore, it offers great performance in terms of repeatability, accuracy, control range and speed. The SFC600 is highly integrated and has a very robust supply chain due to the very low number of electronic components used.

Based on the thermal-mass measurement principle and using our proven CMOSens® MEMS technology, Sensirion builds radical mass flow controllers with best-in-class performance and speed, which, unlike most other devices on the market, do not drift and do not require in-service re-calibration.

If you are looking for a mass flow meter, the SFM6000 is a valve-less sister variant of the SFC6000, offering the same performance at an even lower price.

Applications:

-Semiconductor: front opening unified pods (FOUP), glass coating and treatment

-Analytical instruments: gas chromatography, bioreactors

-Medical equipment: anesthesia, ventilation, heart-lung machines, N2O therapy

-Industrial automation