SFM5460
High-precision, configurable, fast, gas flow sensor for OEM
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm | 0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm | slm | |
| Full scale flow rate 20 and 50 and 100 sccm | 20 and 50 and 100 sccm | sccm | |
| Accuracy 0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
| Maximum operating pressure 5 | 5 | bar | |
| Calibration Air, H2, O2, He, Ar, CO2 and N2 and O2 flow | Air, H2, O2, He, Ar, CO2 and N2 and O2 flow | flow |
| Generic | |||
|---|---|---|---|
| Supply voltage 14 - 26 | 14 - 26 | V | |
| Average supply current 50000 | 50000 | uA | |
| Max. supply current 320000 | 320000 | uA | |
| Interfaces RS485 | RS485 | ||
| Size (LxWxH) 101.1 x 24.4 x 91 | 101.1 x 24.4 x 91 | mm |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
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