SFM6000-OEM
Best price-performance ratio, customizable version
SFC6000 is very small and light and therefore allows the customer to optimize their devices in terms of size and weight. This is a decisive advantage, especially for portable devices. Furthermore, it offers great performance in terms of repeatability, accuracy, control range and speed. The SFC600 is highly integrated and has a very robust supply chain due to the very low number of electronic components used. Based on the thermal-mass measurement principle and using our proven CMOSens® MEMS technology, Sensirion builds radical mass flow controllers with best-in-class performance and speed, which, unlike most other devices on the market, do not drift and do not require in-service re-calibration. If you are looking for a mass flow meter, the SFM6000 is a valve-less sister variant of the SFC6000, offering the same performance at an even lower price. Applications:
- Semiconductor: front opening unified pods (FOUP), glass coating and treatment
- Analytical instruments: gas chromatography, bioreactors
- Medical equipment: anesthesia, ventilation, heart-lung machines, N2O therapy
- Industrial automation
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 2, 5, 20 and 50 | 2, 5, 20 and 50 | slm | |
| Full scale flow rate 500 | 500 | sccm | |
| Accuracy 0.2% FS or 2% SP | 0.2% FS or 2% SP | ||
| Maximum operating pressure 10 | 10 | bar | |
| Calibration Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses | Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses | flow | |
| Fluidic connector ports Push-in 6mm, downmount | Push-in 6mm, downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage 22.8 - 25.2 | 22.8 - 25.2 | V | |
| Average supply current 10 | 10 | mA | |
| Max. supply current 20 | 20 | mA | |
| Interfaces Analog voltage, I²C, RS485 | Analog voltage, I²C, RS485 | ||
| Size (LxWxH) 74 x 21 x 20 | 74 x 21 x 20 | mm |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
Download the respective viewer software to start measuring
Go to download centerStart testing our sensors fast and easy with the evaluation kits
How to get startedLatest Gas flow sensors
Explore
Smart sensors for your application
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.